IP Library › Granted Patent US 9,023,152
Granted Patent B2
US 9,023,152 · App. 12/875,233 · Granted May 5, 2015

CLBO crystal growth

Inventor: Vladimir L. Dribinski (San Jose, CA)
Assignee: KLA-Tencor Corporation
C30B15/02C30B15/14
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Quick Facts
Patent No.
US 9,023,152
App. No.
12/875,233
Granted
May 5, 2015
Kind
B2
Abstract

A solution-stirring top-seeded solution-growth method for forming CLBO of the type where water is added to a precursor mixture, where heavy water is substituted for the water.

Claims (5)

1. In a solution-stirring top-seeded solution-growth method for forming CLBO of the type where water is added to a precursor mixture, the improvement comprising substituting heavy water for the water.

2. A method for testing CLBO for solution inclusion when the CLBO is formed using a solution-stirring top-seeded solution-growth method, the method comprising the steps of using heavy water instead of water in the solution-stirring top-seeded solution-growth method, performing infrared spectroscopy on the CLBO, detecting a shift in an infrared absorption peak of the CLBO from about 3400 reciprocal centimeters to about 2500 reciprocal centimeters, and grading the CLBO based at least in part on a degree of the shift in the infrared absorption peak.

3. A method for testing CLBO for solution inclusion when the CLBO is formed using a solution-stirring top-seeded solution-growth method, the method comprising the steps of using heavy water instead of water in the solution-stirring top-seeded solution-growth method, performing composition analysis on the CLBO to determine an amount of deuterium in the CLBO.

4. The method of claim 3 , wherein the composition analysis comprises secondary ion mass spectrometry.

5. A method for reducing hydrogen inclusion in CLBO, the method comprising the steps of adding heavy water instead of water to a precursor mixture, and performing a solution-stirring top-seeded solution-growth method for forming the CLBO.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2010
From: DRIBINSKI, VLADIMIR L.
To: KLA-TENCOR CORPORATION
Reel/Frame 024937/0159 →
Continuity (2)
Provisional Application 61243278 · Sep 17, 2009
Related Publication 20150007765A1 · Jan 8, 2015