Semiconductor light emitting device
View Patent ↗According to one embodiment, in a semiconductor light emitting device, a first electrode is provided on a first surface of the semiconductor laminated body including a light emitting layer. A joint metal layer is provided on a second surface of the semiconductor laminated body opposed to the first surface of the semiconductor laminated body. A bonding metal layer covers a first surface of the joint metal layer on a side opposite to the semiconductor laminated body and is provided on a side of the second surface of the semiconductor laminated body. A substrate provided with a second electrode is bonded to the bonding metal layer. A layer having an etching resistance property to an etchant for etching the semiconductor laminated body is formed on a side of the surface of the bonding metal layer facing to the semiconductor laminated body.
1. A semiconductor light emitting device, comprising:
a semiconductor layer including a light emitting layer, the semiconductor layer including a first surface and a second surface;
a first metal layer provided on the first surface, the first metal layer including a third surface and a sidewall, the third surface being on a side opposite the semiconductor layer;
a second metal layer directly contacting the first surface, the third surface, the sidewall, and an end portion of an insulating film disposed on the semiconductor layer;
a first electrode provided on the second surface; and
a substrate provided with a second electrode and provided on the second metal layer,
wherein the first metal layer is provided between the second metal layer and the semiconductor layer, a width of the semiconductor layer becomes wider from the first electrode to the substrate, and
the first metal layer is surrounded by the semiconductor layer and the second metal layer.
2. The device of claim 1 , wherein an area of the first metal layer facing the semiconductor layer is smaller than an area of the semiconductor layer facing the first metal layer.
3. The device of claim 2 , wherein the second metal layer directly contacts the sidewall of the first metal layer and the third surface of the first metal layer.
4. The device of claim 1 , wherein the first metal layer is provided on a first portion of the first surface of the semiconductor layer, the first portion not including a second portion of the first surface of the semiconductor layer.
5. The device of claim 1 , wherein the second metal layer includes a nickel layer, a titanium layer, a platinum layer, and a gold layer, which are laminated from the first surface of the semiconductor layer in this order.
6. The device of claim 1 , wherein the first metal layer is a silver layer.
7. The device of claim 1 , wherein the second metal layer includes a nickel layer or a platinum layer.
8. The device of claim 1 , wherein the insulating film is transmissive to a light of a luminescence wavelength and is formed on a portion of the second surface of the semiconductor layer, a sidewall of the semiconductor layer and a peripheral portion of the second metal layer which protrudes beyond the semiconductor layer.
9. The device of claim 1 , wherein the first metal layer is embedded in the semiconductor layer in such that the third surface of the first metal layer that is in contact with the second metal layer is planar with the first surface of the semiconductor layer.
10. A semiconductor light emitting device, comprising:
a semiconductor layer including a light emitting layer, the semiconductor layer having a first surface and a second surface;
a first layer disposed on the first surface, the first layer having a third surface, the third surface being on a side opposite the semiconductor layer, the first layer including a metal;
a second layer disposed on the first surface and the third surface, the second layer including a third layer and a fourth layer, the third layer comprising platinum, the fourth layer comprising titanium, the fourth layer being disposed between the third layer and the semiconductor layer, the second layer having a first region that is directly contacting the first surface, the first region including silicon nitride, an interface between the first region and the semiconductor layer being coplanar with an interface between the first layer and the semiconductor layer;
a first electrode provided on the second surface; and
a substrate on which a second electrode is disposed, the substrate provided on the second layer, wherein
the first layer is provided between the second layer and the semiconductor layer,
a width of the semiconductor layer becomes wider from the first electrode to the substrate, and
the first layer is directly contacting the semiconductor layer and the second layer.
11. The device of claim 10 , wherein the first layer comprises silver.
12. The device of claim 10 , wherein an area of the first layer facing the semiconductor layer is smaller than an area of the semiconductor layer facing the first layer.
13. The device of claim 10 , wherein the fourth layer is disposed on a sidewall of the first layer and the third surface of the first layer.
14. The device of claim 10 , wherein the first layer is provided on a first portion of the first surface of the semiconductor layer, the first portion not including a second portion of the first surface of the semiconductor layer.