Semiconductor device with a bulk single crystal on a substrate
Device and method of forming a device in which a substrate ( 10 ) is fabricated with at least part of an electronic circuit for processing signals. A bulk single crystal material ( 14 ) is formed on the substrate, either directly on the substrate ( 10 ) or with an intervening thin film layer or transition region ( 12 ). A particular application of the device is for a radiation detector.
1. A radiation detector device for detection of high energy photons comprising a substrate fabricated with at least part of an electronic circuit for processing electrical signals, and a bulk single crystal material suitable for absorbing the high energy photons and generating the electrical signals deposited epitaxially onto the substrate such that the electrical signals generated within the bulk single crystal material pass through the bulk single crystal material to the underlying substrate to be processed by the electronic circuit within the substrate, in which the bulk single crystal material comprises cadmium telluride, cadmium zinc telluride, or cadmium manganese telluride, and the device is suitable for detection of x-rays, gamma rays, or both x-rays and gamma rays.
2. The device of claim 1 , in which the substrate is formed from a silicon or gallium arsenide material.
3. The device of claim 1 , in which the electronic circuit includes an application-specific integrated circuit.
4. The device of claim 3 , in which the application-specific integrated circuit includes components selected from the group of transistors, diodes, charge coupled devices, resistors and capacitors.
5. The device of claim 1 , further including metal contact regions provided on the a surface of the substrate.
6. The device of claim 1 , further comprising an interfacial region between the substrate and bulk single crystal material.
7. The device of claim 1 , further comprising a metal layer provided on or over the bulk single crystal material.
8. The device of claim 1 , in which the bulk single crystal material has a thickness of from 0.007 cm to 3.5 cm.