Light emitting device and method of manufacturing the same
View Patent ↗There are provided a light emitting device and a method of manufacturing the same. A light emitting device according to the present invention includes a substrate; an N-type semiconductor layer, an active layer and a P-type semiconductor layer, sequentially formed on the substrate; one or more trenches formed to expose the N-type semiconductor layer by partially removing at least the P-type semiconductor and active layers; a first insulating layer formed on sidewalls of the trenches; and a conductive layer filled in the trenches having the first insulating layer formed therein. According to the present invention, it is possible to obtain a characteristic of uniform current diffusion, and thus, light is uniformly emitted to thereby enhance the light emitting efficiency.
1. A method of manufacturing a light emitting device, the method comprising:
forming an N-type semiconductor layer, an active layer, and a P-type semiconductor layer on a substrate;
etching the P-type semiconductor layer and active layer to form a plurality of trenches arranged in a mesh structure, the trenches to expose the N-type semiconductor layer; and
forming a mesh structured conductive layer directly on and in contact with the N-type semiconductor layer by disposing a conductive material in the trenches.
2. The method of claim 1 , further comprising forming a hole by etching the P-type semiconductor layer and active layer to expose the N-type semiconductor layer.
3. The method of claim 2 , further comprising forming a first electrode on the N-type semiconductor layer in the hole.
4. The method of claim 3 , wherein the first electrode is electrically connected with the mesh structured conductive layer.
5. The method of claim 3 , wherein the first electrode directly contacts the mesh structured conductive layer.
6. The method of claim 1 , further comprising forming a first insulating layer on sidewalls of the trenches before forming the conductive layer.
7. The method of claim 1 , further comprising forming a second insulating layer on the conductive layer.
8. The method of claim 7 , further comprising:
forming a transparent electrode on the P-type semiconductor layer after forming the second insulating layer; and
forming a second electrode on the transparent electrode.
9. The method of claim 1 , wherein the mesh structured conductive layer does not directly contact the P-type layer and the active layer.
10. A method of manufacturing a light emitting device, the method comprising:
forming an N-type semiconductor layer, an active layer, and a P-type semiconductor layer on a substrate;
etching the P-type semiconductor layer and active layer to form a plurality of trenches comprising a mesh structure, the trenches to expose the N-type semiconductor layer;
forming a conductive layer on the N-type semiconductor layer by disposing a conductive material in the trenches;
forming an insulating layer on the conductive layer;
forming a transparent electrode on the P-type semiconductor layer after forming the insulating layer;
forming a second electrode on the transparent electrode; and
removing at least a portion of the transparent electrode to expose a portion of the P-type semiconductor layer before forming the second electrode, wherein the second electrode is formed to be in contact with the exposed P-type semiconductor layer.