IP Library Granted Patent US 8,524,527
Granted Patent B2
US 8,524,527 · App. 12/891,764 · Granted Sep 3, 2013

High-performance single-crystalline N-type dopant-doped metal oxide nanowires for transparent thin film transistors and active matrix organic light-emitting diode displays

Inventors: Chongwu Zhou (Arcadia, CA); PoChiang Chen (San Gabriel, CA)
Assignee: University of Southern California
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,524,527
App. No.
12/891,764
Granted
Sep 3, 2013
Kind
B2
Abstract

Methods, materials, apparatus and systems are described for implementing high-performance arsenic (As)-doped indium oxide (In 2 O 3 ) nanowires for transparent electronics, including their implementation in transparent thin-film transistors (TTFTs) and transparent active-matrix organic light-emitting diodes (AMOLED) displays. In one implementation, a method of fabricating n-type dopant-doped metal oxide nanowires includes dispersing nanoparticle catalysts on a Si/SiO 2 substrate. n-type dopant-doped metal oxide nanowires are grown on the Si/SiO 2 substrate using a laser ablation process. The laser ablation process can include: placing n-type dopant at an upper stream of a furnace; placing the Si/SiO 2 substrate at a down stream end of the furnace; heating the furnace; adding hydrogen to a carrier gas comprising argon and oxygen; flowing the hydrogen added carrier gas over the Si/SiO 2 substrate to suppress oxidation processes and incorporate the n-type dopant into the metal oxide nanowires; and cooling the n-type dopant-doped metal oxide nanowires grown on the Si/SiO 2 substrate.

Claims (15)

1. A method of fabricating n-type dopant-doped metal oxide nanowires, comprising:

dispersing nanoparticle catalysts on a Si/SiO 2 substrate; and

growing n-type dopant-doped metal oxide nanowires on the Si/SiO 2 substrate using a laser ablation process, comprising:

placing n-type dopant at an upper stream of a furnace,

placing the Si/SiO 2 substrate at a downstream end of the furnace,

heating the furnace,

adding hydrogen to a carrier gas comprising argon and oxygen,

flowing the hydrogen-added carrier gas over the Si/SiO 2 substrate to suppress oxidation processes and incorporate the n-type dopant into the metal oxide nanowires, and

cooling the n-type dopant-doped metal oxide nanowires grown on the Si/SiO 2 substrate.

2. The method of claim 1 , wherein the n-type dopant is selected from the following comprising:

zinc;

antimony; and

arsenic.

3. The method of claim 1 , wherein the n-type dopant-doped metal oxide nanowires comprises:

n-type dopant-doped indium oxide (In 2 O 3 ) nanowires.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 15, 2020
From: UNIVERSITY OF SOUTHERN CALIFORNIA
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 052406/0403 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 31, 2011
From: ZHOU, CHONGWU; CHEN, POCHIANG
To: UNIVERSITY OF SOUTHERN CALIFORNIA
Reel/Frame 026365/0001 →
Continuity (2)
Provisional Application 61246087 · Sep 25, 2009
Related Publication 20110073837A1 · Mar 31, 2011