Method for fabrication of a semiconductor device and structure
View Patent ↗A method for fabricating a device, the method including: providing a first layer including first transistors wherein the first transistors include mono-crystalline semiconductor and first alignment marks; overlaying a second semiconductor layer over the first layer, wherein the second layer includes second transistors, the second transistors include mono-crystalline semiconductor and are configured to be memory cells, at least one of the memory cells include a floating body region configured to be charged to a level indicative of a state of the memory cell, and fabricating the second transistors includes alignment to the first alignment marks.
1. A method for fabricating a device, the method comprising:
providing a first layer comprising first transistors wherein said first transistors comprise mono-crystalline semiconductor;
fabricating a first metal layer overlaying said first layer and aligned to said first transistors;
fabricating a second metal layer overlaying said first metal layer and aligned to said first metal layer;
fabricating a third metal layer overlaying said second metal layer and aligned to said second metal layer; and
fabricating a second layer overlaying said third metal layer wherein said second layer comprises second transistors wherein said second transistors comprise mono-crystalline semiconductor, and
wherein said second metal layer has a substantially higher current carrying capability than said first metal layer and said third metal layer.
2. The method according to claim 1 , wherein said second layer has been transferred using an ion-cut layer transfer process.
3. The method according to claim 1 , wherein said second transistors are horizontally oriented transistors.
4. The method according to claim 1 , wherein said second transistors have side gates.
5. The method according to claim 1 , further comprising,
processing an isolation layer overlaying said second layer, and
processing a third layer overlaying said isolation layer,
wherein said third layer comprises third transistors, and
wherein said third transistors are aligned to overlay said second transistors.