IP Library Granted Patent US 8,573,790
Granted Patent B2
US 8,573,790 · App. 12/899,078 · Granted Nov 5, 2013

Light absorbing optical element having micro-relief structure

Inventors: Yutaka Hamamura (Yokohama, JP); Kiyoshi Kadomatsu (Odawara, JP); Yasutoshi Takada (Kawasaki, JP); Yoshiro Tani (Mito, JP)
Assignee: Nikon Corporation
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Quick Facts
Patent No.
US 8,573,790
App. No.
12/899,078
Granted
Nov 5, 2013
Kind
B2
Abstract

An optical element that includes a substrate having two surfaces, each of the surfaces having a micro-relief structure that includes numerous fine protrusions, and a film that includes one or more layers including a metal layer and that is formed on one of the micro-relief structures.

Claims (16)

1. A light absorbing optical element, comprising:

a substrate having an absorption coefficient of 1×10 1 /cm or more in a wavelength range from 400 nm to 800 nm, the substrate having an entrance face and a back face, each of the entrance face and the back face having a micro-relief structure that includes numerous fine protrusions; and

a film that includes one or more layers including a metal layer and is formed on the micro-relief structure of the back face,

wherein when a light enters into and passes through the substrate, the light exits from the micro-relief structure of the back face and then enters into the one or more layers including the metal layer and is absorbed by the metal layer.

2. The optical element according to claim 1 , wherein the substrate comprises a semimetal or a resin.

3. The optical element according to claim 1 , wherein the metal layer comprises chromium or titanium.

4. The optical element according to claim 1 , wherein an aperture is formed in a partial area of the film including one or more layers.

5. An optical apparatus that comprises a light absorbing member that is made of the optical element according to claim 1 .

6. A light source apparatus comprising:

a wavelength converting system that generates an output light including a light component having a wavelength different from a wavelength of an input light; and

a wavelength selective optical system that divides components of different wavelength included in the output light to different optical paths,

wherein a light absorbing member made of the optical element according to claim 1 is arranged in at least one of the different optical paths.

7. The optical element according to claim 1 , wherein the optical element has a transmittance of 0.05% or less in a wavelength range of 200 nm to 800 nm.

8. The optical element according to claim 1 , wherein the film comprises a plurality of metal layers.

9. The optical element according to claim 1 , wherein the film comprises an outer metal layer and an inner buffer layer.

10. The optical element according to claim 1 , wherein the fine protrusions have a height of 50 nm-100 nm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2010
From: HAMAMURA, YUTAKA; KADOMATSU, KIYOSHI; TAKADA, YASUTOSHI; TANI, YOSHIRO
To: NIKON CORPORATION
Reel/Frame 025311/0077 →
Priority Claims (1)
JP 2008-099843 · Apr 8, 2008 · national
Continuity (2)
Continuation PCTJP2009057134 · Apr 7, 2009
Related Publication 20110069393A1 · Mar 24, 2011