Semiconductor device and method of manufacture thereof
A structure including a substrate, an intermediate layer provided and formed directly onto the substrate, a transition region, and a group II-VI bulk crystal material provided and formed as an extension of the transition region. The transition region acts to change the structure from the underlying substrate to that of the bulk crystal. In a method of manufacture, a similar technique can be used for growing the transition region and the bulk crystal layer.
1. A structure including a substrate, an intermediate layer provided and formed directly onto the substrate, a transition region, and a group II-VI bulk crystal material provided and formed as an extension of the transition region, wherein the substrate comprises a substrate of silicon, gallium arsenide, germanium, or silicon carbide, the substrate has a thickness of at least 100 microns, the bulk crystal material has a thickness of at least 700 microns, the intermediate layer has a thickness of between 25 and 1000 microns, and the transition region between the intermediate layer to the material of the bulk crystal has a thickness of between 10 and 500 microns.
2. A structure according to claim 1 , in which the substrate has a thickness of at least 200 microns.
3. A structure according to claim 1 , in which the substrate has a diameter greater than 25 mm.
4. A structure according to claim 1 , in which the bulk crystal material comprises cadmium telluride, cadmium zinc telluride, or cadmium manganese telluride.
5. A structure according to claim 1 , in which the intermediate layer comprises a group II-VI material.
6. A structure according to claim 5 , in which the group II-VI material in the intermediate layer is CdTe, CZT, or CdS.