Semiconductor device and method for manufacturing the same
View Patent ↗A vertical transistor comprises a semiconductor region, a pillar region formed on the semiconductor region, a gate insulating film formed so as to cover a side surface of the pillar region, a gate electrode formed on the gate insulating film, a first impurity diffusion region formed in an upper portion of the pillar region, and a second impurity diffusion region formed in the semiconductor region so as to surround the pillar region. The first impurity diffusion region is formed so as to be spaced from the side surface of the pillar region.
1. A semiconductor device, comprising a transistor,
wherein the transistor comprises:
a semiconductor region;
a pillar region formed on the semiconductor region;
a gate electrode formed over a side surface of the pillar region with a gate insulating film interposed between the gate electrode and the side surface of the pillar region; and
a first impurity diffusion region including a side surface and a bottom surface, and
wherein the first impurity diffusion region is formed in an upper portion of the pillar region so that both the side surface and the bottom surface of the first impurity diffusion region are spaced from the side surface of the pillar region.
2. The semiconductor device according to claim 1 ,
wherein the transistor is a full depletion type transistor.
3. The semiconductor device according to claim 2 ,
wherein a length of the pillar region in a direction perpendicular to the side surface of the pillar region is equal to or less than two times of a height of the pillar region.
4. The semiconductor device according to claim 1 ,
wherein the gate electrode extends from region over the side surface of the pillar region to region on a top surface of the pillar region, and
the gate electrode is disposed such that a portion of the gate electrode on the top surface of the pillar region does not overlap with the first impurity diffusion region.
5. The semiconductor device according to claim 4 , further comprising:
a contact plug formed on the first impurity diffusion region; and
a sidewall insulating film formed on the top surface of the pillar region and between the gate electrode and the contact plug.
6. The semiconductor device according to claim 5 ,
wherein a thickness of the sidewall insulating film in a direction perpendicular to the side surface of the pillar region is 20 nm or less.
7. The semiconductor device according to claim 1 , further comprising:
a capacitor connected to the first impurity diffusion region; and
a bit line connected to a second impurity diffusion region formed in the semiconductor region,
wherein the transistor and capacitor constitute a memory cell of DRAM (Dynamic Random Access Memory).
8. A semiconductor device, comprising a transistor,
wherein the transistor comprises:
a semiconductor substrate comprising a semiconductor region and a pillar region formed on the semiconductor region;
a gate insulating film formed so as to cover a side surface of the pillar region;
a gate electrode formed on the gate insulating film;
a first impurity diffusion region formed in an upper portion of the pillar region and including a side surface and a bottom surface; and
a second impurity diffusion region formed in the semiconductor region so as to surround the pillar region, and
wherein both the side surface and the bottom surface of the first impurity diffusion region are spaced from the side surface of the pillar region.
9. The semiconductor device according to claim 8 ,
wherein the transistor is a full depletion type transistor.
10. The semiconductor device according to claim 9 ,
wherein a length of the pillar region in a direction perpendicular to the side surface of the pillar region is equal to or less than two times of a height of the pillar region.
11. The semiconductor device according to claim 8 ,
wherein the gate electrode extends from region over the side surface of the pillar region to region on a top surface of the pillar region, and
the gate electrode is disposed such that a portion of the gate electrode on the top surface of the pillar region does not overlap with the first impurity diffusion region.
12. The semiconductor device according to claim 11 , further comprising:
a contact plug formed on the first impurity diffusion region; and
a sidewall insulating film formed on the top surface of the pillar region and between the gate electrode and the contact plug.
13. The semiconductor device according to claim 12 ,
wherein a thickness of the sidewall insulating film in a direction perpendicular to the side surface of the pillar region is 20 nm or less.
14. The semiconductor device according to claim 8 , further comprising:
a capacitor connected to the first impurity diffusion region; and
a bit line connected to the second impurity diffusion region formed in the semiconductor region,
wherein the transistor and capacitor constitute a memory cell of DRAM (Dynamic Random Access Memory).