IP Library › Patent Application 12905026
Patent Application
App. No. 12/905,026

Plasma Resistant Processing Apparatus

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Quick Facts
Patent No.
US None
App. No.
12/905,026
Abstract

There is provided a processing apparatus undergoing various treatments using plasma and protected from plasma so as not to be damaged. The processing apparatus is one using plasma and having a protective layer comprising a fluorine-containing elastomer on the whole or a part of a surface exposed to plasma in the processing apparatus.

Claims (10)

1 . A processing apparatus using plasma, which has a protective layer comprising a fluorine-containing elastomer (A) on the whole or a part of surfaces exposed to plasma in the processing apparatus.

2 . The processing apparatus of claim 1 , wherein the fluorine-containing elastomer (A) is a not-crosslinked fluorine-containing elastomer.

3 . The processing apparatus of claim 1 , wherein the fluorine-containing elastomer (A) is a crosslinked fluorine-containing elastomer.

4 . The processing apparatus of claim 1 , wherein the fluorine-containing elastomer (A) further comprises a filler.

5 . The processing apparatus of claim 1 , wherein the fluorine-containing elastomer (A) is a perfluoroelastomer.

6 . The processing apparatus of claim 1 , wherein the protective layer is provided at least on a surface of an edge portion exposed to plasma in the processing apparatus.

7 . The processing apparatus of claim 1 , wherein the protective layer is provided at least on a surface profiling a small space exposed to plasma in the processing apparatus.

8 . The processing apparatus of claim 1 , wherein the processing apparatus using plasma is a plasma etching equipment.

9 . The processing apparatus of claim 1 , wherein the processing apparatus using plasma is a plasma CVD equipment.

10 . The processing apparatus of claim 1 , wherein the processing apparatus using plasma is an ashing equipment.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2014
From: GREENE, TWEED OF DELAWARE, LLC
To: GREENE, TWEED TECHNOLOGIES, INC.
Reel/Frame 032263/0712 →
CHANGE OF NAME Recorded Feb 7, 2014
From: GREENE, TWEED OF DELAWARE, INC.
To: GREENE, TWEED OF DELAWARE, LLC
Reel/Frame 032174/0324 →