Imprint lithography method
View Patent ↗Improved wetting characteristics together with improved release characteristics with respect to a substrate and an imprint lithography mold having imprinting material disposed therebetween.
1. An imprint lithography method comprising:
(a) disposing a quantity of a first surfactant on a surface of an imprint lithography mold;
(b) disposing a first polymerizable composition a surface of an imprint lithography substrate, wherein the first polymerizable composition comprises a bulk material and an additional quantity of the first surfactant in a selected weight ratio;
(c) contacting the first polymerizable composition with the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon; and
(d) polymerizing the first polymerizable composition between the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon and the surface of the imprint lithography substrate to form a first polymerized layer between the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon and the surface of the imprint lithography substrate; and
(e) separating the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon from the first polymerized layer,
wherein the first polymerizable composition wets the surface of the mold having the quantity of the first surfactant disposed thereon more readily than a second polymerizable composition wets the surface of the mold having a similar quantity of a second surfactant disposed thereon, such that the first polymerizable composition spreads more rapidly on the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon than the second polymerizable composition spreads on the surface of the imprint lithography mold having the similar quantity of the second polymerizable composition disposed thereon, the second polymerizable composition comprising the bulk material and the second surfactant in the selected weight ratio, wherein the second surfactant has the formula:
where x is an integer in a range of 0 to 6, inclusive; and y is an integer in a range of 0 to 15, inclusive, and
wherein less force is required to separate the first polymerized layer from the surface of the mold with the quantity of the first surfactant disposed thereon than to separate a second polymerized layer from the surface of the mold with the similar quantity of the second surfactant disposed thereon, the second polymerized layer formed by contacting the second polymerizable composition with the surface of the imprint lithography mold having the similar quantity of the second surfactant disposed thereon and polymerizing the second polymerizable composition between the surface of the imprint lithography mold having the similar quantity of the second surfactant disposed thereon and the imprint lithography substrate.
2. The imprint lithography method of claim 1 , wherein the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon does not have an a priori release layer.
3. The imprint lithography method of claim 1 , wherein the contact angle of the second polymerizable composition on the surface of the imprint lithography mold having the similar quantity of the second surfactant disposed thereon is greater than 40°.
4. The imprint lithography method of claim 1 , wherein the contact angle of the first polymerizable composition on the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon is about 26.5° or less.
5. The imprint lithography method of claim 4 , wherein the contact angle of the first polymerizable composition on the surface of the imprint lithography mold having the quantity of the first surfactant disposed thereon is less than about 20°.
6. The imprint lithography method of claim 1 , further comprising forming a lamella layer between the first polymerized layer and the surface of the imprint lithography mold on which the quantity of the first surfactant is disposed, the lamella layer comprising a portion of the first surfactant disposed on the surface of the imprint lithography mold and a portion of the first surfactant in the first polymerizable composition.