Gate structure of semiconductor device
View Patent ↗A gate structure of a semiconductor device includes a first low resistance conductive layer, a second low resistance conductive layer, and a first type conductive layer disposed between and directly contacting sidewalls of the first low resistance conductive layer and the second low resistance conductive layer.
1. A gate structure of a semiconductor device, comprising:
a first low resistance conductive layer;
a second low resistance conductive layer;
a first type conductive layer different from the first low resistance conductive layer, disposed between and directly contacting sidewalls of the first low resistance conductive layer and the second low resistance conductive layer; and
a second type conductive layer disposed in the outer sidewall of the second low resistance conductive layer.
2. The gate structure in accordance with claim 1 , wherein the first type conductive layer is further disposed in the bottom and outer sidewall of the first low resistance conductive layer.
3. The gate structure in accordance with claim 2 , wherein the second type conductive layer disposed in the bottom of the second low resistance conductive layer.
4. The gate structure in accordance with claim 3 , further comprising:
a high-k dielectric layer disposed in the bottoms of the first type conductive layer and the second type conductive layer.
5. The gate structure in accordance with claim 3 , further comprising:
a high-k dielectric layer disposed in the bottoms and outer sidewalls of the first type conductive layer and the second type conductive layer.
6. The gate structure in accordance with claim 5 , further comprising:
a dielectric layer disposed in the bottom of the high-k dielectric layer.
7. The gate structure in accordance with claim 5 , further comprising:
a dielectric layer disposed in the bottom and outer sidewall of the high-k dielectric layer.
8. The gate structure in accordance with claim 5 , wherein the high-k dielectric layer contacts a first type doped region below the first type conductive layer.
9. The gate structure in accordance with claim 5 , wherein the high-k dielectric layer contacts a second type doped region below the second type conductive layer.
10. The gate structure in accordance with claim 5 , wherein material of the high-k dielectric layer comprises tantalum oxide, Ba 1-x Sr x TiO 3 , silicon nitride, silicon oxynitride, silicon carbide, silicon carbon oxide, hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, zirconium oxide, zirconium silicon oxide, zirconium hafnium oxide, titanium oxide, cerium oxide, lanthanum oxide, lanthanum aluminum oxide or aluminum oxide.
11. The gate structure in accordance with claim 8 , wherein the first type is P-type.
12. The gate structure in accordance with claim 9 , wherein the second type is N-type.
13. The gate structure in accordance with claim 1 , wherein material of the first type conductive layer comprises tungsten, tungsten nitride, platinum, titanium nitride or ruthenium.
14. The gate structure in accordance with claim 1 , wherein material of the first type conductive layer comprises tantalum nitride, tantalum silicon nitride, tantalum carbide, titanium aluminum nitride, aluminum-titanium alloy, titanium aluminum compound or aluminum.
15. The gate structure in accordance with claim 1 , wherein top surfaces of the first type conductive layer, the first low resistance conductive layer and the second low resistance conductive layer are at a same level.
16. The gate structure in accordance with claim 1 , wherein the first low resistance conductive layer and the second low resistance conductive layer are not overlapped with each other.