Phase change memory devices
View Patent ↗A phase change material including a high adhesion phase change material formed on a dielectric material and a low adhesion phase change material formed on the high adhesion phase change material. The high adhesion phase change material includes a greater amount of at least one of nitrogen and oxygen than the low adhesion phase change material. The phase change material is produced by forming a first chalcogenide compound material including an amount of at least one of nitrogen and oxygen on the dielectric material and forming a second chalcogenide compound including a lower percentage of at least one of nitrogen and oxygen on the first chalcogenide compound material. A phase change random access memory device, and a semiconductor structure are also disclosed.
1. A phase change memory device, comprising a first electrode and a second electrode;
a dielectric material in contact with the first electrode; and
a phase change material in contact with the dielectric material and the second electrode, the phase change material comprising a greater concentration of at least one of nitrogen and oxygen toward the dielectric material than toward the second electrode.
2. The phase change memory device of claim 1 , wherein the phase change material comprises a chalcogenide compound material comprising a chalcogen ion selected from the group consisting of oxygen, sulfur, selenium, tellurium, and polonium and at least one electropositive element selected from the group consisting of nitrogen, silicon, nickel, gallium, germanium, arsenic, silver, indium, tin, antimony, gold, lead, and bismuth.
3. The phase change memory device of claim 1 , wherein the phase change material comprises a chalcogenide compound material comprising an empirical formula of Ge x Sb 100-(x+y) Te y , wherein x ranges from approximately 5 atomic percent to approximately 60 atomic percent and y ranges from approximately 20 atomic percent to approximately 70 atomic percent.
4. The phase change memory device of claim 1 , wherein the phase change material toward the dielectric material comprises from about 5 atomic percent of at least one of nitrogen and oxygen to about 8 atomic percent of at least one of nitrogen and oxygen.
5. The phase change memory device of claim 1 , wherein the phase change material toward the second electrode comprises less than about 4 atomic percent of at least one of nitrogen and oxygen.
6. The phase change memory device of claim 1 , wherein the phase change material toward the second electrode comprises approximately 2.5 atomic percent of at least one of nitrogen and oxygen.
7. The phase change memory device of claim 1 , wherein the phase change material comprises a substantially heterogeneous phase change material.
8. The phase change memory device of claim 1 , wherein the phase change material comprises a thickness of from approximately 10 angstroms to approximately 1000 angstroms.
9. The phase change memory device of claim 1 , wherein a fracture energy between the phase change material and the dielectric material is at least about 0.94 J/m 2 .
10. The phase change memory device of claim 1 , wherein a fracture energy between the phase change material and the dielectric material is at least about 1.5 J/m 2 .
11. The phase change memory device of claim 1 , wherein a fracture energy between the phase change material and the dielectric material is at least about 2.0 J/m 2 .
12. A phase change memory device, comprising
a dielectric material in contact with a first electrode; and
a phase change material in contact with the dielectric material, the first electrode, and a second electrode, the phase change material having a greater concentration of at least one of nitrogen and oxygen adjacent to the dielectric material than adjacent to the second electrode.
13. The phase change memory device of claim 12 , wherein the phase change material adjacent to the dielectric material comprises from about 5 atomic percent of the at least one of nitrogen and oxygen to about 8 atomic percent of the at least one of nitrogen and oxygen.