Graphite crucible and silicon single crystal manufacturing apparatus
View Patent ↗A graphite crucible for silicon single crystal manufacturing by the Czochralski method, having a long life cycle, contains at least one gas venting hole provided in a corner portion of the crucible. Gas generated by reaction between the graphite crucible and a quartz crucible is released to the outside through the gas venting hole, and formation of SiC on the surface of the graphite crucible and deformation of the quartz crucible caused by the pressure of the generated gas are prevented.
1. A graphite crucible for the manufacture of a silicon single crystal by the Czochralski method, comprising:
a wall portion, a bottom portion, and a corner portion connecting the wall portion and the bottom portions, and
at least one gas venting hole provided in the corner portion of the graphite crucible, wherein the at least one gas venting hole is provided in a direction which is approximately horizontally or inclined upwardly, and the at least one gas venting hole has a cross-sectional area of 225 mm 2 or less.
2. The graphite crucible of claim 1 , wherein a plurality of 3 to 8 gas venting holes, consisting of holes having a cross-sectional area of 225 mm 2 or less are provided in the corner portion of the graphite crucible.
3. The graphite crucible of claim 1 , wherein the at least one gas venting hole has a radius of from 5 to 8 mm.
4. The graphite crucible of claim 1 , wherein the graphite crucible is divided into two or three parts, and contains two to three gas venting holes.
5. The graphite crucible of claim 1 which is a one-part crucible, and has from 6 to 8 gas venting holes.
6. The graphite crucible of claim 4 , wherein the gas venting holes are equally spaced around the corner portion.
7. The graphite crucible of claim 5 , wherein the gas venting holes are equally spaced around the corner portion.
8. A silicon single crystal manufacturing apparatus according to the Czochralski method, comprising the graphite crucible according to claim 1 .
9. A silicon single crystal manufacturing apparatus according to the Czochralski method, comprising the graphite crucible according to claim 2 .