Hybrid electric device using piezoelectric polymer substrate
View Patent ↗The present invention relates to an integrated, composite hybrid electric device in which various devices are formed as a single unit on one flexible substrate, and a fabrication method thereof. More particularly, the present invention a hybrid electric device in which a display device, a vibration-generating (or vibration-sensing) device, and a non-volatile memory device are formed on a single flexible piezoelectric polymer substrate into a single unit by using a flexible piezoelectric polymer substrate whose both surfaces are thinly deposited with a patterned transparent oxidation electrode, and a fabrication method thereof.
1. A hybrid electric device using a piezoelectric polymer substrate, the hybrid electric device being constructed by forming an integrated unit in which a display device and a vibration-generating or -sensing device share the piezoelectric polymer substrate,
wherein the hybrid electric device comprises:
a flexible piezoelectric polymer substrate;
an electrode pattern formed, by vacuum-depositing an electrode material on both surfaces of the flexible piezoelectric polymer substrate to form electrode thin films and by patterning at least one of the electrode thin films through a laser irradiation-based room-temperature dry etching process;
a light-emitting layer stacked on the electrode pattern and
an electrode stacked on the light-emitting layer,
wherein the display device uses the electrode pattern on which the light-emitting layer is stacked and the electrode stacked on the light-emitting layer as electric conductors, and the vibration-generating or -sensing device uses the electrode thin films formed on the both surfaces of the flexible piezoelectric polymer substrate as electric conductors.
2. The hybrid electric device of claim 1 , wherein the hybrid electric device is constructed by forming an integrated unit in which a memory device shares share the piezoelectric polymer substrate together with the display device and the vibration-generating or -sensing device,
wherein the hybrid electric device further comprises:
a conductive polymer layer stacked on the electrode pattern, the conductive polymer having nano-particles contained therein and
an electrode stacked on the conductive polymer layer,
wherein the memory device uses the electrode pattern on which the conductive polymer layer is stacked and the electrode stacked on the conductive polymer layer as electric conductors.
3. The hybrid electric device of claim 1 , wherein the piezoelectric polymer substrate is a polyvinylidene fluoride (PVDF) substrate.
4. The hybrid electric device of claim 1 , wherein the electrode thin films formed by vacuum-depositing the electrode material are transparent oxidation electrode thin films.
5. The hybrid electric device of claim 4 , wherein the transparent oxidation electrode thin films are ITO electrode thin films.
6. The hybrid electric device of claim 1 , wherein the piezoelectric polymer substrate and the electrode pattern have an additional electrode and an insulating layer interposed therebetween in such a fashion that the additional electrode are stacked on the piezoelectric polymer substrate and the insulating layer is stacked on the additional electrode.