Magnetic recording medium, method of manufacturing magnetic recording medium, and magnetic recording/reproducing apparatus
View Patent ↗Disclosed is a method of manufacturing a magnetic recording medium capable of effectively and reliably removing foreign materials on the surface of a magnetic recording medium, preventing a mask layer from remaining on the surface of the magnetic recording medium, and forming the pattern of a magnetic layer with high productivity. The method of manufacturing a magnetic recording medium includes: a step of forming a magnetic layer on a non-magnetic substrate; a step of forming a mask layer on the magnetic layer; a step of patterning the mask layer to form a mask pattern; a step of forming a magnetic recording pattern on the magnetic layer using the mask pattern; a step of burnishing the surface of the mask pattern with an abrasive; and a step of removing the mask pattern.
1. A method of manufacturing a magnetic recording medium including a magnetically separated magnetic recording pattern, comprising:
a step of forming at least a magnetic layer on a non-magnetic substrate;
a step of forming a mask layer on the magnetic layer;
a step of patterning the mask layer to form a mask pattern;
a step of forming the magnetic recording pattern on the magnetic layer using the mask pattern;
a step of burnishing the surface of the mask pattern with an abrasive; and
a step of removing the mask pattern.
2. The method of manufacturing a magnetic recording medium according to claim 1 ,
wherein, in the step of burnishing the surface of the mask pattern with the abrasive, a tape including the abrasive is pressed against the mask pattern to abrade the mask pattern.
3. The method of manufacturing a magnetic recording medium according to claim 1 ,
wherein, before the surface of the mask pattern is burnished by the abrasive, a lubricant is applied onto the surface of the mask pattern.
4. The method of manufacturing a magnetic recording medium according to claim 3 ,
wherein the lubricant is applied with a thickness of 1 Å or more.
5. The method of manufacturing a magnetic recording medium according to claim 1 ,
wherein, in the process of forming the magnetic recording pattern on the magnetic layer using the mask pattern, a region of the magnetic layer that is not covered with the mask pattern is exposed to reactive plasma or a reactive ion atmosphere such that the magnetic characteristics of the region of the magnetic layer are changed.
6. A magnetic recording medium manufactured by the method of manufacturing a magnetic recording medium according to claim 1 .
7. A magnetic recording/reproducing apparatus comprising:
the magnetic recording medium according to claim 6 ;
a driving unit that drives the magnetic recording medium in a recording direction;
a magnetic head including a recording unit and a reproducing unit;
a unit that moves the magnetic head relative to the magnetic recording medium; and
a recording/reproduction signal processing unit that inputs signals to the magnetic head and reproduces signals output from the magnetic head.