MEMS device with protection rings
View Patent ↗A microelectromechanical system (MEMS) device and a method for fabricating the same are described. The MEMS device includes a first electrode and a second electrode. The first electrode is disposed on a substrate, and includes at least two metal layers, a first protection ring and a dielectric layer. The first protection ring connects two adjacent metal layers, so as to define an enclosed space between two adjacent metal layers. The dielectric layer is disposed in the enclosed space and connects two adjacent metal layers. The second electrode is disposed on the first electrode, wherein a cavity is formed between the first electrode and the second electrode.
1. A microelectromechanical system (MEMS) device, comprising:
a first electrode, disposed on a substrate and comprising:
at least two metal layers;
a first protection ring, connecting two adjacent metal layers, so as to define an enclosed space between two adjacent metal layers; and
a dielectric layer, disposed in the enclosed space and connecting two adjacent metal layers; and
a second electrode, disposed on the first electrode, wherein a cavity is formed between the first electrode and the second electrode.
2. The MEMS device according to claim 1 , wherein the first protection ring substantially corresponds to a profile of each metal layer.
3. The MEMS device according to claim 1 , wherein the first protection ring comprises metal.
4. The MEMS device according to claim 1 , wherein the first electrode further comprising at least one second protection ring disposed in the enclosed space and connecting two adjacent metal layers.
5. The MEMS device according to claim 4 , wherein the second protection ring comprises metal.
6. The MEMS device according to claim 1 , wherein the first electrode further comprises a plurality of vent holes.
7. The MEMS device according to claim 1 , wherein the second electrode comprises a first insulating layer, a second insulating layer, and a conductive layer located between the first insulating layer and the second insulating layer.
8. The MEMS device according to claim 1 , wherein the first electrode and the second electrode are suspended on the substrate.