IP Library Granted Patent US 8,907,390
Granted Patent B2
US 8,907,390 · App. 12/944,663 · Granted Dec 9, 2014

Magnetic tunnel junction structure

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Quick Facts
Patent No.
US 8,907,390
App. No.
12/944,663
Granted
Dec 9, 2014
Kind
B2
Abstract

Disclosed herein is a thermally-assisted magnetic tunnel junction structure including a thermal barrier. The thermal barrier is composed of a cermet material in a disordered form such that the thermal barrier has a low thermal conductivity and a high electric conductivity. Compared to conventional magnetic tunnel junction structures, the disclosed structure can be switched faster and has improved compatibility with standard semiconductor fabrication processes.

Claims (49)

1. A thermally-assisted magnetic tunnel junction structure, comprising:

a magnetic tunnel junction; and

a thermal barrier coupled to the magnetic tunnel junction, wherein the thermal barrier comprises a cermet material that comprises a ceramic component and a metallic component, the metallic component having a long range order that is no greater than 100 angstroms in the thermal barrier.

2. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the magnetic tunnel junction comprises a free magnetic layer, a fixed magnetic layer, and a magnetic tunnel junction layer positioned between the free magnetic layer and the fixed magnetic layer, and the thermal barrier is attached to a major surface of the free magnetic layer of the magnetic tunnel junction.

3. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the metallic component of the cermet has a long range order that is no greater than 200 angstroms.

4. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the cermet material has a long range order that is no greater than 80 angstroms.

5. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the thermal barrier has a thermal conductivity no greater than 2 W/mK.

6. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the thermal barrier has an electric conductivity in the range of 1×10 4 S/m to 60×10 4 S/m at a temperature of 20° C.

7. The thermally-assisted magnetic tunnel junction structure of claim 1 , wherein the cermet material comprises a matrix base material with another material interspersed within or at a surface of the matrix base material.

8. A thermally-assisted magnetic random access memory structure, comprising:

a magnetic tunnel junction comprising a free magnetic layer, a fixed magnetic layer, and a tunnel junction layer positioned between the free magnetic layer and the fixed magnetic layer; and

a thermal barrier comprising a cermet material, and pinning the free magnetic layer below a temperature threshold and acting as a paramagnet at and above the temperature threshold when the thermal barrier is heated.

9. The thermally-assisted magnetic tunnel junction structure of claim 8 , wherein the cermet comprises a binary compound of a transition metal and nitrogen.

10. The thermally-assisted magnetic tunnel junction structure of claim 8 , wherein the cermet comprises a binary compound being comprised of one of SiO x , BO x , PO x , and AlO x .

11. The thermally-assisted magnetic tunnel junction structure of claim 8 , wherein the cermet comprises a ternary material X—Y—Z, where X is a transition metal; Y is one of Si, Al, and B; and Z is one of nitride, O—N, C—N, and P—N.

12. The thermally-assisted magnetic tunnel junction structure of claim 8 , wherein the cermet material comprises a composite of a transition metal and one of a nitride, oxynitride, and carbonitride.

13. A magnetic random access memory device, comprising:

a magnetic tunnel junction comprising a fixed magnetic layer, a free magnetic layer, and a magnetic tunnel junction layer; and

a thermal barrier adjacent to the magnetic tunnel junction and comprising a varistor having a non-linear current-voltage property.

14. The magnetic random access memory device of claim 13 , wherein the varistor comprises a cermet.

15. The magnetic random access memory device of claim 14 , wherein the thermal barrier comprises a material having the formula X a Y b Z c , wherein X is a transition metal, Y is selected from one of Group IIIA and Group IVA, and Z is selected from one of Group VA and Group VIA.

16. The magnetic random access memory device of claim 14 , wherein Y is one of Si, B, Al, and Ge.

17. The magnetic random access memory device of claim 14 , wherein Z is one of N and O.

18. The magnetic random access memory device of claim 14 , wherein X is one of Ir, Ru, Re, Pd, Pt, Rh, Co, and Ti.

19. The magnetic random access memory device of claim 14 , wherein X is one of an early transition metal and a late transition metal.

20. The magnetic random access memory device of claim 14 , wherein the thermal barrier comprises at least one of CoSiN and TiSiN.

21. The magnetic random access memory device of claim 14 , wherein the thermal barrier comprises an early transition metal nitride.

22. The magnetic random access memory device of claim 14 , the thermal barrier comprises an electrically conductive metal oxide and another chemical element.

23. The magnetic random access memory device of claim 22 , wherein the another chemical element is one of Si and O.

24. The magnetic random access memory device of claim 14 , wherein the thermal barrier comprises an oxynitride material.

25. The magnetic random access memory device of claim 14 , wherein the thermal barrier has a thermal conductivity no greater than 3 W/mK and an electric resistivity of at least 200 μΩ-cm at a temperature of 20° C.

26. The magnetic random access memory device of claim 25 , wherein the thermal barrier has a thermal conductivity no greater than 2 W/mK at a temperature of 20° C.

27. The magnetic random access memory device of claim 14 , wherein the thermal barrier has an electric resistivity of at least 1000 μΩ-cm at a temperature of 20° C.

28. A thermally-assisted magnetic tunnel junction structure, comprising:

a magnetic tunnel junction; and

a thermal barrier coupled to the magnetic tunnel junction, wherein the thermal barrier has a thermal conductivity no greater than 3 W/mK and an electric resistivity of at least 200 μΩ-cm at a temperature of 20° C.

29. The thermally-assisted magnetic tunnel junction structure of claim 28 , wherein the thermal barrier has a thermal conductivity no greater than 2 W/mK at a temperature of 20° C.

30. The thermally-assisted magnetic tunnel junction structure of claim 28 , wherein the thermal barrier has an electric resistivity of at least 1000 μΩ-cm at a temperature of 20° C.

31. The thermally-assisted magnetic tunnel junction structure of claim 28 , wherein the thermal barrier has a long range order that is no greater than 100 angstroms in the thermal barrier.

32. The thermally-assisted magnetic tunnel junction structure of claim 31 , wherein the thermal barrier comprises a metallic material and a dielectric material, and wherein the metallic material has a long range order no greater than 100 angstroms in the thermal barrier.

33. The thermally-assisted magnetic tunnel junction structure of claim 32 , wherein the metallic material has a long range order no greater than 80 angstroms.

34. A thermally-assisted magnetic tunnel junction structure, comprising:

a magnetic tunnel junction; and

a thermal barrier coupled to the magnetic tunnel junction, wherein the thermal barrier has a negative thermal coefficient of resistivity.

35. The thermally-assisted magnetic tunnel junction structure of claim 34 , wherein the thermal barrier has a thermal conductivity no greater than 3 W/mK and an electric resistivity of at least 200 μΩ-cm at a temperature of 20° C.

36. The thermally-assisted magnetic tunnel junction structure of claim 35 , wherein the thermal barrier has a thermal conductivity no greater than 2 W/mK at a temperature of 20° C.

37. The thermally-assisted magnetic tunnel junction structure of claim 35 , wherein the thermal barrier has an electric resistivity of at least 1000 μΩ-cm at a temperature of 20° C.

38. The thermally-assisted magnetic tunnel junction structure of claim 35 , wherein the thermal barrier comprises a varistor.

39. The thermally-assisted magnetic tunnel junction structure of claim 35 , wherein the thermal barrier comprises a cermet.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2024
From: CROCUS TECHNOLOGY SA
To: ALLEGRO MICROSYSTEMS, LLC
Reel/Frame 066350/0669 →
CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF ASSIGNEE'S NAME AND ADDRESS PREVIOUSLY RECORDED AT REEL: 025707 FRAME: 0156. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Oct 23, 2023
From: REID, JASON
To: CROCUS TECHNOLOGY SA
Reel/Frame 065316/0830 →
RELEASE OF SECURITY INTEREST Recorded Aug 30, 2023
From: LLC "SBERBANK INVESTMENTS"
To: CROCUS TECHNOLOGY, INC.
Reel/Frame 064783/0420 →
SECURITY INTEREST Recorded Apr 13, 2018
From: CROCUS TECHNOLOGY, INC.
To: LLC "SBERBANK INVESTMENTS"
Reel/Frame 045938/0810 →
RELEASE OF SECURITY INTEREST Recorded Apr 9, 2018
From: KREOS CAPITAL IV (LUXEMBOURG) SARL
To: CROCUS TECHNOLOGY, INC.
Reel/Frame 045865/0555 →
RELEASE OF SECURITY INTEREST Recorded Apr 9, 2018
From: KREOS CAPITAL IV (LUXEMBOURG) SARL
To: CROCUS TECHNOLOGY, INC.
Reel/Frame 045871/0622 →