Fabrication method and fabrication apparatus of group III nitride crystal substance
A fabrication method of a group III nitride crystal substance includes the steps of cleaning the interior of a reaction chamber by introducing HCl gas into the reaction chamber, and vapor deposition of a group III nitride crystal substance in the cleaned reaction chamber. A fabrication apparatus of a group III nitride crystal substance includes a configuration to introduce HCl gas into the reaction chamber, and a configuration to grow a group III nitride crystal substance by HVPE. Thus, a fabrication method of a group III nitride crystal substance including the method of effectively cleaning deposits adhering inside the reaction chamber during crystal growth, and a fabrication apparatus employed in the fabrication method are provided.
1. A fabrication method of a group III nitride crystal substance, the method comprising steps of:
cleaning an interior of a reaction chamber by introducing HCl gas into said reaction chamber, and
vapor deposition of a group III nitride crystal substance having Si atoms doped in said cleaned reaction chamber, wherein:
said reaction chamber is provided with a gas exhaust pipe and a trap device attached at at least one of an inlet and an outlet of said gas exhaust pipe, and said gas trap device traps ammonium chloride powder generated as by-product during at least one of said step of cleaning of an interior of a reaction chamber and said step of vapor deposition of group III nitride crystal substance.
2. The fabrication method of a group III nitride crystal substance according to claim 1 , wherein said group III nitride crystal substance is formed at a region growing at a C-plane.
3. The fabrication method of a group III nitride crystal substance according to claim 2 , wherein a sapphire substrate is employed as an underlying substrate in said step of vapor deposition of a group III nitride crystal substance.
4. The fabrication method of a group III nitride crystal substance according to claim 2 , wherein any one of a (111) GaAs substrate, a (0001) SiC substrate, and an LiAlGaO substrate is employed as an underlying substrate in said step of vapor deposition of a group III nitride crystal substance.
5. The fabrication method of a group III nitride crystal substance according to claim 2 , wherein a GaN substrate is employed as an underlying substrate in said step of vapor deposition of a group III nitride crystal substance.
6. The fabrication method of a group III nitride crystal substance according to claim 1 , wherein said group III nitride crystal substrate is grown with controlling the amount of Si doping gas such that a carrier concentration of said group III nitride crystal substance attains predetermined amount.
7. The fabrication method of a group III nitride crystal substance according to claim 6 , wherein said Si doping gas is any one of SiH 4 gas, SiH 2 Cl 2 gas and SiCl 4 gas.
8. The fabrication method of a group III nitride crystal substance according to claim 1 , wherein a reactor tube constituting said reaction chamber is a quartz reactor tube.