ADHESION LAYERS IN NANOIMPRINT LITHOGRAHY

1 . A method of coating a double-sided disk, the method comprising:

immersing a double-sided disk in a liquid adhesive composition, the double-sided disk comprising a carbon overcoating on both sides of the disk;

removing the double-sided disk from the liquid adhesive composition; and

drying the adhesive composition to form a first adhesion layer adhered directly to the carbon overcoating on a first side of the disk and a second adhesion layer adhered directly to the carbon overcoating on a second side of the disk.

2 . The method of claim 1 , further comprising:

disposing a first polymerizable material on the first adhesion layer;

contacting the first polymerizable material with an imprint lithography template;

polymerizing the first polymerizable material on the first adhesion layer to form a first patterned layer adhered to the first adhesion layer; and

separating the imprint lithography template from the first patterned layer.

3 . The method of claim 1 , wherein the carbon overcoating comprises amorphous-hydrogenated carbon (CH x ) or amorphous-nitrogenated carbon (CN x ).

4 . The method of claim 1 , wherein the adhesive composition comprises a multi-functional reactive compound, and the multi-functional reactive compound comprises a linker group and two or more functional groups.

5 . The method of claim 4 , wherein the functional groups are independently selected from the group consisting of carboxy, epoxy, acrylic, hydroxy, and methoxy groups.

6 . The method of claim 4 , wherein the multi-functional reactive compound adheres to the carbon overcoating by covalent bonding.

7 . The method of claim 6 , wherein the multi-functional reactive compound comprises a carboxy group, and the multi-functional reactive compound adheres to the carbon overcoating by covalent bonding through the carboxy group.

8 . The method of claim 4 , wherein the multi-functional reactive compound adheres to the first polymerizable material by covalent bonding.

9 . The method of claim 8 , wherein the multi-functional reactive compound comprises an acrylic group or a methacrylic group, and the multi-functional reactive compound adheres to the first polymerizable material by covalent bonding through the acrylic group or the methacrylic group.

10 . The method of claim 4 , wherein the linker group is —CH 2 —.

11 . The method of claim 1 , wherein a thickness of the first and second adhesion layers is between about 1 nm and about 5 nm, and a standard deviation of a thickness of the first and second adhesion layers is between about 0.5 nm and about 1.5 nm.

12 . A method of coating a double-sided disk, the method comprising:

immersing a double-sided disk in a liquid adhesive composition, the double-sided disk comprising an intermediate layer over a carbon overcoating on both sides of the disk;

removing the double-sided disk from the liquid adhesive composition; and

drying the adhesive composition to form a first adhesion layer adhered directly to the intermediate layer on a first side of the disk and a second adhesion layer adhered directly to the intermediate layer on a second side of the disk.

13 . The method of claim 12 , further comprising:

disposing a first polymerizable material on the first adhesion layer;

contacting the first polymerizable material with an imprint lithography template;

polymerizing the first polymerizable material on the first adhesion layer to form a first patterned layer adhered to the first adhesion layer; and

separating the imprint lithography template from the first patterned layer.

14 . The method of claim 12 , wherein the intermediate layer comprises Ta, Si 3 N 4 , SiO 2 , Cr, TiW, TiCr, Ru, SiN, or a combination thereof.

15 . The method of claim 12 , wherein the adhesive composition comprises a multi-functional reactive compound, and the multi-functional reactive compound comprises a linker group and two or more functional groups.

16 . The method of claim 15 , wherein the functional groups are independently selected from the group consisting of carboxy, epoxy, acrylic, hydroxy, and methoxy groups.

17 . The method of claim 15 , wherein the multi-functional reactive compound adheres to the intermediate layer by covalent bonding.

18 . The method of claim 17 , wherein the multi-functional reactive compound comprises a carboxy group, and the multi-functional reactive compound adheres to the intermediate layer by covalent bonding through the carboxy group.

19 . The method of claim 15 , wherein the multi-functional reactive compound adheres to the first polymerizable material by covalent bonding.

20 . The method of claim 19 , wherein the multi-functional reactive compound comprises an acrylic group or a methacrylic group, and the multi-functional reactive compound adheres to the first polymerizable material by covalent bonding through the acrylic group or the methacrylic group.

21 . The method of claim 12 , wherein a thickness of the first and second adhesion layers is between about 1 nm and about 5 nm, and a standard deviation of a thickness of the first and second adhesion layers is between about 0.5 nm and about 1.5 nm.

22 . The method of claim 12 , wherein the intermediate layer is tantalum, and an adhesive force between a solidified imprint resist the tantalum intermediate layer as measured in a shear test exceeds 45 lbf.

23 . A double-sided disk comprising a carbon overcoating on each side of the disk, and an adhesion layer formed by dip coating, the adhesion layer directly adhered to each carbon overcoating, wherein a thickness of each adhesion layer is between 2 nm and 4 nm.

24 . A method of coating a mesa on an imprint lithography template, the method comprising:

cleaning the surface of the template;

applying adhesive material to the mesa, such that the surface of the mesa and a surrounding portion of the template are substantially covered by the adhesive material;

allowing the template to remain substantially motionless for a length of time, during which time some of the adhesive material forms covalent bonds with the surface of the template, including the mesa;

rinsing a portion of the adhesive material from the template with a solvent, wherein rinsing comprises spinning the template; and

drying the template.