Surface inspection method and surface inspection apparatus
View Patent ↗A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio.
1. A substrate inspection apparatus comprising:
an irradiating system which irradiates said substrate with first light;
a detection system which detects second light from said substrate irradiated with the first light; and
a processing system which detects an anomaly of said substrate based on a detection result of said detection system;
wherein said detection system includes
a reflection system which reflects said second light at least two times to form an image; and
a photoelectric conversion system which detects the image formed by said reflection system.
2. A substrate inspection apparatus according to claim 1 ,
wherein said reflection system includes a plurality of first reflection units arranged at a plurality of azimuth angles, respectively, with respect to said substrate.
3. A substrate inspection apparatus according to claim 2 ,
wherein said plurality of first reflecting units define substantially a first rotational paraboloid surface.
4. A substrate inspection apparatus according to claim 2 ,
wherein said reflection system includes a plurality of second reflecting units arranged at higher angle of elevation than said plurality of first reflecting units, and at positions corresponding to said plurality of azimuth angles.
5. A substrate inspection apparatus according to claim 4 ,
wherein said plurality of second reflecting units define substantially a second rotational paraboloid surface.
6. A substrate inspection apparatus according to claim 4 ,
wherein said photoelectric conversion system includes a plurality of detection units arranged at positions corresponding to the positions of said plurality of second reflecting units, and
wherein said detection units detect light a plurality of images formed by said plurality of second reflecting units.
7. A substrate inspection apparatus according to claim 1 ,
wherein said reflection system includes at least two curved mirrors.
8. A substrate inspection method comprising:
using an irradiating system to irradiate said substrate with first light;
using a detection system to detect second light from said substrate irradiated with the first light; and
using a processing system to detect an anomaly of said substrate based on a detection result of said detection system;
wherein said detection system includes
a reflection system which reflects said second light at least two times to form an image; and
a photoelectric conversion system which detects the image formed by said reflection system.
9. A substrate inspection method according to claim 8 ,
wherein said reflection system includes a plurality of first reflection units arranged at a plurality of azimuth angles, respectively, with respect to said substrate.
10. A substrate inspection method according to claim 9 ,
wherein said plurality of first reflecting units define substantially a first rotational paraboloid surface.
11. A substrate inspection method according to claim 9 ,
wherein said reflection system includes a plurality of second reflecting units arranged at higher angle of elevation than said plurality of first reflecting units, and at positions corresponding to said plurality of azimuth angles.
12. A substrate inspection method according to claim 11 ,
wherein said plurality of second reflecting units define substantially a second rotational paraboloid surface.
13. A substrate inspection method according to claim 11 ,
wherein said photoelectric conversion system includes a plurality of detection units arranged at positions corresponding to the positions of said plurality of second reflecting units, and
wherein said detection units detect light a plurality of images formed by said plurality of second reflecting units.
14. A substrate inspection method according to claim 8 ,
wherein said reflection system includes at least two curved mirrors.