Methods of making a semiconductor device
View Patent ↗Various embodiments of the present invention include a semiconductor device and a fabrication method therefor, the semiconductor device including a first semiconductor chip disposed on a substrate, a first sealing resin sealing the first semiconductor chip, a built-in semiconductor device disposed on the first sealing resin, and a second sealing resin sealing the first sealing resin and the built-in semiconductor device and covering a side surface of the substrate. According to an aspect of the present invention, it is possible to provide a high-quality semiconductor device and a fabrication method therefor, in which downsizing and cost reduction can be realized.
1. A method comprising:
disposing a first semiconductor chip on a first surface of a first substrate, the first substrate comprising a second surface opposing the first surface;
depositing a first resin above the first semiconductor chip;
disposing the first substrate on a dummy sheet, the dummy sheet comprises a depression wherein the first substrate is disposed;
disposing a built-in semiconductor device on the first resin, the built-in semiconductor device comprising:
a second substrate;
a second semiconductor chip disposed on the second substrate; and
a second resin that seals the second semiconductor chip; and
depositing a third resin above the built-in semiconductor device and the first resin.
2. The method of claim 1 , further comprising reverse wire bonding the first substrate to the built-in semiconductor device.
3. The method of claim 1 , further comprising cutting the third resin such that the third resin remains on a side surface of the first substrate.
4. The method of claim 1 , further comprising forming bumps on the second surface of the first substrate.
5. The method of claim 4 , further comprising disposing the first substrate on the dummy sheet so that the bumps are embedded in the dummy sheet.
6. The method of claim 1 , further comprising electrically testing the first semiconductor chip disposed on the first substrate before the disposing the first substrate on the dummy sheet.
7. The method of claim 1 , wherein the depositing the third resin further comprises depositing the third resin above the dummy sheet.
8. The method of claim 1 , wherein the dummy sheet defines an opening within the depression.
9. A method comprising:
disposing a first semiconductor chip on a first surface of a first substrate, the first substrate comprising a second surface opposing the first surface;
sealing the first semiconductor chip with a first resin;
disposing the first substrate on a dummy sheet, the dummy sheet comprises a depression wherein the first substrate is disposed;
disposing a built-in semiconductor device on the first resin, the built-in semiconductor device comprising:
a second substrate;
a second semiconductor chip disposed on the second substrate; and
a second resin that seals the second semiconductor chip; and
sealing the built-in semiconductor device with a third resin.
10. The method of claim 9 , further comprising reverse wire bonding the first substrate to the built-in semiconductor device.
11. The method of claim 9 , further comprising cutting the third resin such that the third resin remains on a side surface of the first substrate.
12. The method of claim 9 , further comprising forming bumps on the second surface of the first substrate.
13. The method of claim 12 , further comprising disposing the first substrate on the dummy sheet so that the bumps are embedded in the dummy sheet.
14. The method of claim 9 , further comprising electrically testing the first semiconductor chip disposed on the first substrate before the disposing the first substrate on the dummy sheet.
15. The method of claim 9 , wherein the sealing the built-in semiconductor device with the third resin further comprises depositing the third resin above the dummy sheet.
16. The method of claim 9 , wherein the dummy sheet defines an opening within the depression.
17. The method of claim 9 , wherein the dummy sheet comprises a metal.
18. The method of claim 9 , wherein the dummy sheet comprises an insulator.
19. The method of claim 1 , wherein the dummy sheet is a metal dummy sheet.
20. The method of claim 1 , wherein the dummy sheet comprises a resin.