Method of manufacturing semiconductor light-emitting device
A method of manufacturing a semiconductor light-emitting device which includes the steps of forming a plurality of light-emitting device sections ( 40 ), having an approximately rectangular shape in plan view, on a substrate ( 10 ) in a matrix shape, forming a first dividing groove ( 61 ) between the long sides ( 41 ) of the light-emitting device sections ( 40 ) so that the long side ( 41 ) of the light-emitting device section ( 40 ) is along an easily cleaved plane of the substrate ( 10 ), forming a second dividing groove ( 62 ), having a larger width than the width of the first dividing groove ( 61 ), between short sides ( 42 ) of the light-emitting device sections ( 40 ), and dividing the substrate ( 10 ) along a first dividing groove ( 61 ) and a second dividing groove ( 62 ) to cut out the light-emitting device section ( 40 ).
1. A method of manufacturing a semiconductor light-emitting device, comprising the steps of:
forming a plurality of light-emitting device sections, having an approximately rectangular shape in plan view, on a substrate in a matrix shape;
forming a first dividing groove between the long sides of the light-emitting device sections so that the long side of the light-emitting device section is along an easily cleaved plane of the substrate;
forming a second dividing groove, having a larger width than the width of the first dividing groove, between the short sides of the light-emitting device sections; and
dividing the substrate along the first dividing groove and the second dividing groove to cut out the light-emitting device section.
2. The method of manufacturing a semiconductor light-emitting device according to claim 1 , wherein the substrate is made of sapphire.
3. The method of manufacturing a semiconductor light-emitting device according to claim 1 , wherein the first dividing groove is formed so as to be parallel to the a-axis of the sapphire.
4. The method of manufacturing a semiconductor light-emitting device according to claim 1 , wherein the width of the second dividing groove is set to at least twice the width of the first dividing groove.
5. The method of manufacturing a semiconductor light-emitting device according to claim 1 , wherein the first dividing groove and the second dividing groove are formed by one means selected from the group consisting of a laser method, a scribing method, a dicing method, and a dry etching method.
6. The method of manufacturing a semiconductor light-emitting device according to claim 1 , wherein the substrate has an altered portion formed by laser irradiation from the front (top face) or the rear of the substrate so as to be along the central line of the first dividing groove and the central line of the second dividing groove.
7. The method of manufacturing a semiconductor light-emitting device according to claim 6 , wherein as to the height of the altered portion formed by the laser irradiation, the height of the altered portion formed along the central line of the first dividing groove and the height of the region of the altered portion formed along the central line of the second dividing groove are different from each other.
8. The method of manufacturing a semiconductor light-emitting device according to claim 6 , wherein as to the height of the altered portion formed by laser irradiation, the height of the altered portion formed along the central line of the second dividing groove is larger than the height of the altered portion formed along the central line of the first dividing groove.