Lithography mask having sub-resolution phased assist features
View Patent ↗Techniques are disclosed for using sub-resolution phased assist features (SPAF) in a lithography mask to improve through process pattern fidelity and/or mitigate inverted aerial image problems. The technique also may be used to improve image contrast in non-inverted weak image sites. The use of SPAF in accordance with some such embodiments requires no adjustment to existing design rules, although adjustments can be made to enable compliance with mask inspection constraints. The use of SPAF also does not require changing existing fab or manufacturing processes, especially if such processes already comprehend phased shift mask capabilities. The SPAFs can be used to enhance aerial image contrast, without the SPAFs themselves printing.
1. A lithography mask for fabricating semiconductor circuits, comprising:
a main feature having a phase and a polarity, wherein the main feature is provided with a length and a width; and
a sub-resolution phased assist feature (SPAF) having a polarity that is the same as the main feature and a phase that is 180° out-of-phase with the phase of the main feature, wherein the SPAF is provided with a length and a width, and wherein the length of the SPAF is shorter than the length of the main feature.
2. The lithography mask of claim 1 wherein the mask includes a plurality of main features and one or more SPAFs.
3. The lithography mask of claim 1 wherein the SPAF is synthesized in a weak non-inverted image drawn space of the mask.
4. The lithography mask of claim 1 wherein the SPAF is synthesized in an inverted image drawn space of the mask.
5. The lithography mask of claim 1 wherein the SPAF has 100% transmittance.
6. The lithography mask of claim 1 wherein the main feature has 100% transmittance.
7. The lithography mask of claim 1 wherein the SPAF is configured with an overlay margin to compensate for registration shift during mask formation.
8. The lithography mask of claim 7 wherein the overlay margin does not overlap with the main feature.
9. The lithography mask of claim 1 further comprising:
a plurality of resist lines each having a width, wherein the SPAF is associated with a resist line having a width that is larger than the width of the other resist lines.
10. The lithography mask of claim 9 wherein the main feature and the SPAF each comprise quartz or glass and the resist lines comprise chrome.
11. The lithography mask of claim 1 wherein the SPAF and main feature have 100% transmittance, the mask further comprising:
a plurality of lines each having a length and width and less than 100% transmittance, wherein the SPAF is etched into one of the lines that has a width that is larger than the width of the other lines.
12. The lithography mask of claim 1 further comprising:
one or more sub-resolution assist features, each having a phase that is the same as the main feature.
13. The lithography mask of claim 1 wherein the mask is for fabricating sub-32 nm technology nodes.
14. A lithography system comprising the lithography mask of claim 1 .
15. A lithography mask for fabricating semiconductor circuits, comprising:
a plurality of main features, each having a phase and a polarity, wherein each of the main features is provided with a length and a width;
one or more sub-resolution phased assist features (SPAFs), each having a polarity that is the same as the polarity of the main features and a phase that is 180° out-of-phase with the phase of the main features, wherein each of the one or more SPAFs is provided with a length and a width, and wherein the length of at least one of the SPAFs is shorter than the length of a neighboring main feature; and
a plurality of resist lines, wherein each of the resist lines is provided with a length and a width.
16. The lithography mask of claim 15 wherein each of the one or more SPAFs is synthesized in one of a weak non-inverted image drawn space of the mask or an inverted image drawn space of the mask.
17. The lithography mask of claim 15 wherein at least one of the SPAFs is configured with an overlay margin to compensate for registration shift during mask formation, and the overlay margin does not overlap with a neighboring main feature.
18. The lithography mask of claim 15 wherein at least one of the SPAFs is associated with a resist line having a width that is larger than the width of the other resist lines.
19. The lithography mask of claim 15 wherein at least one of the SPAFs is associated with a main feature having a width that is larger than the width of the other main features.
20. The lithography mask of claim 15 wherein the SPAFs and main features have 100% transmittance and the resist lines have less than 100% transmittance, and at least one of the SPAFs is etched into a resist line that has a width that is larger than the width of the other resist lines.