Strain relaxation using metal materials and related structures
View Patent ↗Methods of fabricating semiconductor structures include forming a plurality of openings extending through a semiconductor material and at least partially through a metal material and deforming the metal material to relax a remaining portion of the semiconductor material. The metal material may be deformed by exposing the metal material to a temperature sufficient to alter (i.e., increase) its ductility. The metal material may be formed from one or more of hafnium, zirconium, yttrium, and a metallic glass. Another semiconductor material may be deposited over the remaining portions of the semiconductor material, and a portion of the metal material may be removed from between each of the remaining portions of the semiconductor material. Semiconductor structures may be formed using such methods.
1. A method of fabricating a semiconductor structure, comprising:
forming a metal material over at least one of a semiconductor material and a support material;
bonding the semiconductor material to the support material, the metal material disposed between the semiconductor material and the support material; and
deforming the metal material to relax the semiconductor material.
2. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises deforming the metal material to reduce compressive strain in a III-V type semiconductor material comprising indium gallium nitride.
3. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises deforming the metal material to reduce tensile strain in a III-V type semiconductor material comprising aluminum gallium nitride.
4. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises heating the metal material.
5. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises heating hafnium or an alloy thereof to a temperature of greater than or equal to about 400° C.
6. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises heating zirconium or an alloy thereof to a temperature of greater than or equal to about 400° C.
7. The method of claim 1 , wherein deforming the metal material to relax the semiconductor material comprises depositing another semiconductor material over the semiconductor material at a temperature sufficient to alter a ductility of the metal material.
8. A method of fabricating a semiconductor structure, comprising:
forming a metal material over at least one of a semiconductor material and a support material;
bonding the semiconductor material to the support material, the metal material disposed between the semiconductor material and the support material;
removing a portion of each of the semiconductor material and the metal material to form a plurality of openings;
deforming the metal material to relax the semiconductor material responsive to heating the metal material to alter a ductility thereof;
depositing another semiconductor material over the remaining portions of the semiconductor material; and
removing a portion of the metal material from between each of the remaining portions of the semiconductor material.
9. The method of claim 8 , wherein removing a portion of each of a the semiconductor material and the metal material to form a plurality of openings comprises forming the plurality of openings to extend through the semiconductor material and partially into the metal material.
10. The method of claim 8 , wherein heating the metal material to alter a ductility thereof occurs simultaneously with depositing another semiconductor material over the remaining portions of the semiconductor material.
11. The method of claim 8 , wherein heating the metal material to alter a ductility thereof comprises deforming a metal material comprising at least one of hafnium and zirconium.
12. The method of claim 8 , further comprising heating the metal material to alter a ductility thereof after removing the portion of the metal material between each of the remaining portions of the semiconductor material.
13. A method of fabricating a semiconductor structure, comprising:
forming a metal material over at least one of a semiconductor material and a support material;
bonding the semiconductor material to the support material, the metal material disposed between the semiconductor material and the support material;
forming a plurality of openings extending through the semiconductor material and at least partially through the metal material;
deforming the metal material responsive to altering a ductility of the metal material to relax a remaining portion of the semiconductor material; and
depositing another semiconductor material over the relaxed portion of the semiconductor material.
14. The method of claim 13 , wherein forming a plurality of openings extending through the semiconductor material and at least partially through the metal material comprises forming the plurality of openings extending through indium gallium nitride and at least partially through at least one of hafnium and zirconium.
15. The method of claim 13 , wherein altering a ductility of the metal material comprises heating the another semiconductor material.
16. A method of fabricating a semiconductor structure, comprising:
forming a metal material over at least one of a semiconductor material and a support material;
bonding the semiconductor material to the support material, the metal material disposed between the semiconductor material and the support material;
removing a portion of each of the metal material and the semiconductor material overlying the metal material to form a plurality of openings therein;
deforming the metal material responsive to altering a ductility of the metal material to relax remaining portions of the semiconductor material;
forming a sacrificial material over two or more remaining portions of the semiconductor material and a region of the metal material exposed therebetween;
removing a portion of the sacrificial material to expose a surface of the remaining portions of the semiconductor material; and
forming another semiconductor material laterally over the sacrificial material using the remaining portions of the semiconductor material as a seed material.
17. The method of claim 16 , wherein removing a portion of each of the metal material and the semiconductor material overlying the metal material comprises forming the plurality of openings extending though the semiconductor material and only partially into the metal material.
18. The method of claim 16 , wherein altering a ductility of the metal material comprises heating the metal material to a temperature sufficient to increase the ductility thereof.
19. The method of claim 16 , wherein altering a ductility of the metal material comprises deforming the metal material to form a substantially planar upper surface thereon.
20. A method of forming an engineered substrate, comprising:
forming a metal material over at least one of a semiconductor material and a support material;
bonding the semiconductor material to the support material, the metal material disposed between the semiconductor material and the support material;
deforming the metal material to relax the semiconductor material;
laterally extending the semiconductor material to form an epitaxial semiconductor material over the metal material; and
exposing the metal material to a temperature sufficient to increase a ductility thereof.
21. The method of claim 20 , wherein exposing the metal material to a temperature sufficient to increase a ductility thereof comprises exposing the metal material to a temperature sufficient to increase a ductility thereof to reduce tensile strain in the epitaxial semiconductor material comprising aluminum gallium nitride.
22. The method of claim 20 , wherein exposing the metal material to a temperature sufficient to increase a ductility thereof comprises exposing the metal material to a temperature sufficient to increase a ductility thereof to reduce compressive strain in the epitaxial semiconductor material comprising indium gallium nitride.