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App. No. 12/979,654 · Confirmation No. 3398

SYSTEM, METHOD AND APPARATUS FOR REDUCING PLASMA NOISE ON POWER PATH OF ELECTROSTATIC CHUCK

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-04-22 ABN Abandonment 2 View
2014-10-14 CTNF Non-Final Rejection 22 View
2014-10-14 892 List of references cited by examiner 1 View
2014-10-14 SRNT Examiner's search strategy and results 5 View
2014-10-14 SRFW Search information including classification, databases and other search related notes 1 View
2014-10-14 FWCLM Index of Claims 1 View
2014-03-04 RCEX Request for Continued Examination (RCE) 1 View
2014-03-04 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-03-04 CLM Claims 5 View
2014-03-04 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-03-04 WFEE Fee Worksheet (SB06) 2 View
2014-03-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-03-04 TRAN.LET Transmittal Letter 1 View
2014-03-04 WFEE Fee Worksheet (SB06) 1 View
2013-12-06 CTFR Final Rejection 18 View
2013-12-06 892 List of references cited by examiner 1 View
2013-12-06 FOR Foreign Reference 38 View
2013-12-06 SRFW Search information including classification, databases and other search related notes 1 View
2013-12-06 FWCLM Index of Claims 1 View
2013-12-06 SRNT Examiner's search strategy and results 6 View
2013-07-12 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2013-07-12 OA.APPENDIX Office Action Appendix 2 View
2013-07-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-07-11 CLM Claims 4 View
2013-07-11 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-07-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-07-11 TRAN.LET Transmittal Letter 1 View
2013-07-11 WFEE Fee Worksheet (SB06) 1 View
2013-04-11 CTNF Non-Final Rejection 13 View
2013-04-11 892 List of references cited by examiner 1 View
2013-04-11 SRFW Search information including classification, databases and other search related notes 1 View
2013-04-11 BIB Bibliographic Data Sheet 1 View
2013-04-11 SRNT Examiner's search strategy and results 4 View
2013-04-11 FWCLM Index of Claims 1 View
2013-03-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-15 PA.. Power of Attorney 1 View
2013-03-15 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-03-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-03-15 TRAN.LET Transmittal Letter 1 View
2013-02-04 ELC. Response to Election / Restriction Filed 1 View
2013-02-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-01-15 CTRS Requirement for Restriction/Election 7 View
2012-06-28 NTC.PUB Notice of Publication 1 View
2011-03-28 WFEE Fee Worksheet (SB06) 1 View
2011-03-28 APP.FILE.REC Filing Receipt 3 View
2011-03-17 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2011-03-17 OATH Oath or Declaration filed 2 View
2011-03-17 WFEE Fee Worksheet (SB06) 2 View
2011-03-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-01-18 APP.FILE.REC Filing Receipt 3 View
2011-01-18 NTC.MISS.PRT Notice to File Missing Parts 2 View
2011-01-18 WFEE Fee Worksheet (SB06) 1 View
2010-12-28 SPEC Specification 6 View
2010-12-28 CLM Claims 5 View
2010-12-28 ABST Abstract 1 View
2010-12-28 DRW Drawings-only black and white line drawings 3 View
2010-12-28 ADS Application Data Sheet 4 View
2010-12-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
12/979,654
Filed
2010-12-28
Pub. No.
US20120160807A1
Art Unit
1716