IP Library Granted Patent US 8,518,736
Granted Patent B2
US 8,518,736 · App. 12/980,666 · Granted Aug 27, 2013

Growth and transfer of monolithic horizontal nanowire superstructures onto flexible substrates

Inventors: Zhong L. Wang (Marietta, GA); Sheng Xu (Atlanta, GA)
Assignee: Georgia Tech Research Corporation
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,518,736
App. No.
12/980,666
Granted
Aug 27, 2013
Kind
B2
Abstract

In a method of making a monolithic elongated nanowire, a mask polymer layer is applied to a selected crystal surface of a seed crystal. A plurality of spaced apart elongated openings is defined through the mask polymer layer, thereby exposing a corresponding plurality of portions of the crystal surface. The openings are disposed so as to be aligned with and parallel to a selected crystal axis of the seed crystal. The portions of the crystal surface are subjected to a chemical nutrient environment that causes crystalline material to grow from the plurality of portions for at least a period of time so that monocrystalline members grow from the elongated openings and until the monocrystalline members laterally expand so that each monocrystalline member grows into and merges with an adjacent one of the monocrystalline members, thereby forming a monolithic elongated nanowire.

Claims (31)

1. A method of making a monolithic elongated nanowire, comprising the steps of:

a. applying a mask polymer layer to a selected crystal surface of a seed crystal;

b. defining a plurality of spaced apart elongated openings through the mask polymer layer, thereby exposing a corresponding plurality of portions of the crystal surface, the openings disposed so as to be aligned with and parallel to a selected crystal axis of the seed crystal; and

c. subjecting the portions of the crystal surface to a chemical nutrient environment that causes crystalline material to grow from the plurality of portions for at least a period of time so that monocrystalline members grow from the elongated openings and until the monocrystalline members laterally expand so that each monocrystalline member grows into and merges with an adjacent one of the monocrystalline members, thereby forming a monolithic elongated nanowire.

2. The method of claim 1 , wherein the mask polymer layer comprises poly(methyl methacrylate).

3. The method of claim 1 , wherein the seed crystal comprises a zinc oxide crystal.

4. The method of claim 3 , wherein the selected crystal surface comprises a selected one of a (2 1 1 0) surface or a (0 1 1 0) surface.

5. The method of claim 1 , further comprising the steps of:

a. applying a pre-polymer to the monolithic elongated nanowire and to the mask polymer layer;

b. allowing the pre-polymer to polymerize, thereby forming with the mask polymer layer a flexible substrate that encapsulates the monolithic elongated nanowire; and

c. peeling the flexible substrate away from the selected crystal surface of the seed crystal with the monolithic elongated nanowire embedded therein.

6. The method of claim 5 , wherein the applying a pre-polymer step comprises applying methyl methacrylate.

7. The method of claim 5 , further comprising the step of oxygen plasma etching a selected side of the flexible substrate thereby exposing a side of the monolithic elongated nanowire.

8. The method of claim 5 , wherein the nanowire includes a first end and an opposite second end, the method further comprising the steps of:

a. applying a first electrical contact to the first end; and

b. applying a second electrical contact to the second end.

9. A method of making an encapsulated nanostructure, comprising the steps of:

a. applying a mask polymer layer to a selected crystal surface of a seed crystal;

b. defining at least one opening through the mask polymer layer, thereby exposing a portion of the crystal surface;

c. subjecting the portion of the crystal surface to a chemical nutrient environment that causes crystalline material to grow from the portion, thereby forming a monolithic elongated nanostructure;

d. applying a pre-polymer to the nanostructure and to the mask polymer layer;

e. allowing the pre-polymer to polymerize, thereby forming a flexible substrate that encapsulates the nanostructure with the mask polymer layer; and

f. peeling the flexible substrate away from the selected crystal surface of the seed crystal with the nanostructure embedded therein.

10. The method of claim 9 , wherein the mask polymer layer comprises poly(methyl methacrylate).

11. The method of claim 9 , wherein the seed crystal comprises a zinc oxide crystal.

12. The method of claim 11 , wherein the selected crystal surface comprises a selected one of a (2 1 1 0) surface or a (0 1 1 0) surface.

13. The method of claim 9 , wherein the applying a pre-polymer step comprises applying methyl methacrylate.

14. The method of claim 9 , further comprising the step of oxygen plasma etching a selected side of the flexible substrate thereby exposing a side of the nanostructure.

15. The method of claim 9 , wherein the nanostructure includes a first end and an opposite second end, the method further comprising the steps of:

a. applying a first electrical contact to the first end; and

b. applying a second electrical contact to the second end.

Assignments (2)
CONFIRMATORY LICENSE Recorded Sep 14, 2011
From: GEORGIA TECH RESEARCH CORPORATION
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 026916/0022 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 22, 2011
From: WANG, ZHONG L.; XU, SHENG
To: GEORGIA TECH RESEARCH CORPORATION
Reel/Frame 026170/0229 →
Continuity (1)
Related Publication 20120168710A1 · Jul 5, 2012