Semiconductor device
A semiconductor device includes a silicon substrate, and a NiSi layer provided on the silicon substrate aiming to suppress oxidation of the surface of a NiSi layer and the resistivity increase. The NiSi layer includes a bottom NiSi region and a top NiSi region. The bottom NiSi region provided in contact with silicon surface, and containing substantially no nitrogen. The top NiSi region is a nitrided NiSi region provided in contact with the bottom NiSi region, and containing nitrogen. The NiSi layer has a total thickness of 50 nm or below.
1. A semiconductor device, comprising:
a silicon layer:
a first silicide layer containing nickel provided on the silicon layer; and
a second silicide layer containing nickel provided on the first silicide layer,
wherein said second silicide layer has a nitrogen concentration greater than a nitrogen concentration of said first silicide layer.
2. The semiconductor device according to claim 1 , wherein said first silicide layer is formed between and directly contacts said silicon layer and said second silicide layer.
3. The semiconductor device according to claim 2 , wherein said silicon layer comprises a gate electrode and source/drain regions.
4. The semiconductor device according to claim 1 , wherein the nitrogen concentration of said first silicide layer is substantially zero.
5. The semiconductor device according to claim 1 , wherein a thickness of said second silicide layer is less than a thickness of said first silicide layer.
6. The semiconductor device according to claim 1 , wherein the nitrogen concentration of said first silicide layer is 1 at% or less and the nitrogen concentration of said second silicide layer is 2 at% or more.