Positive resist composition and method for production of microlens
There is provided a positive resist composition excellent in transparency, heat resistance, and refractive index particularly for forming a microlens and for forming a planarization film; and a microlens and a planarization film formed from the positive resist composition. A positive resist composition comprising a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure; a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and a component (C): a solvent. The positive resist composition wherein the alkali-soluble polymer as the component (A) is a polymer comprising a unit structure of Formula (1): where when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0.
1. A microlens formed from a positive resist composition comprising:
a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure;
a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and
a component (C): a solvent;
wherein:
the alkali-soluble polymer as the component (A) is:
a polymer comprising a unit structure of Formula (1):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5, m4 is an integer of 0 to 4, and (m2+m4) is an integer of 1 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4); and
when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0; or
a polymer comprising a unit structure of Formula (2) and a unit structure of Formula (3):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5;
m4 is an integer of 0 to 4;
(m2+m4) is an integer of 0 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4);
R 4 and R 5 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
Q 2 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A) and the ratio n3 of the unit structure of Formula (3) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, and 0.3≦n2+n3≦1.0; or
a polymer comprising:
a unit structure of Formula (1) as defined above, wherein (m2+m4) is an integer of 0,
optionally a unit structure of Formula (4), and
optionally a unit structure of Formula (5):
where:
R 6 and R 7 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
R 8 is a C 1-10 substituted or unsubstituted alkyl group, a C 3-6 epoxy group, a C 6-20 aryl group, or a combination thereof;
Q 3 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group;
R 9 and R 10 are individually a C 1-10 substituted or unsubstituted alkyl group, a C 1-6 hydroxyalkyl group, a hydroxy group, a halogen group, a carboxy group, or a C 1-10 alkoxy group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.3≦n1≦0.7, 0≦n4≦0.4, 0≦n5≦0.4, and 0.3≦n1+n4+n5≦1.0; or
a polymer comprising:
a unit structure of Formula (2) as defined above, wherein (m2+m4) is an integer of 0,
a unit structure of Formula (3) as defined above,
a unit structure of Formula (4) as defined above, and
a unit structure of Formula (5) as defined above, wherein when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A), the ratio n3 of the unit structure of Formula (3) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, 0<n4≦0.4, 0<n5≦0.4, and 0.3<n2+n3+n4+n5≦1.0; and
the component (B) is a compound having a structure of Formula (6):
where:
R 11 is a hydrogen atom or a group of Formula (7):
where:
R 13 is a single bond or a —SO 2 — group;
R 14 is a C 1-10 alkyl group; and
m8 is an integer of 0 to 3;
R 12 is a C 1-10 substituted or unsubstituted alkyl group, a halogen group, or a C 1-10 alkoxy group;
m5 is an integer of 0 or 1, where when m5 is 0, m6 is an integer of 1 to 5, and m7 is an integer satisfying 0≦m7≦(5−m6), and when m5 is 1, m6 is an integer of 1 to 7 and m7 is an integer satisfying 0≦m7≦(7−m6); and
R 11 is a group of Formula (7) in an amount of 10 to 100% by mol, based on the number of moles of all —OR 11 groups contained in the structure of Formula (6).
2. A solid-state imaging device, comprising a microlens formed from a positive resist composition comprising:
a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure;
a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and
a component (C): a solvent;
wherein:
the alkali-soluble polymer as the component (A) is:
a polymer comprising a unit structure of Formula (1):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5, m4 is an integer of 0 to 4, and (m2+m4) is an integer of 1 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4); and
when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0; or
a polymer comprising a unit structure of Formula (2) and a unit structure of Formula (3):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5;
m4 is an integer of 0 to 4;
(m2+m4) is an integer of 0 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4);
R 4 and R 5 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
Q 2 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A) and the ratio n3 of the unit structure of Formula (3) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, and 0.3≦n2+n3≦1.0; or
a polymer comprising:
a unit structure of Formula (1) as defined above, wherein (m2+m4) is an integer of 0,
optionally a unit structure of Formula (4), and
optionally a unit structure of Formula (5):
where:
R 6 and R 7 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
R 8 is a C 1-10 substituted or unsubstituted alkyl group, a C 3-6 epoxy group, a C 6-20 aryl group, or a combination thereof;
Q 3 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group;
R 9 and R 10 are individually a C 1-10 substituted or unsubstituted alkyl group, a C 1-6 hydroxyalkyl group, a hydroxy group, a halogen group, a carboxy group, or a C 1-10 alkoxy group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.3≦n1≦0.7, 0≦n4≦0.4, 0≦n5≦0.4, and 0.3≦n1+n4+n5≦1.0; or
a polymer comprising:
a unit structure of Formula (2) as defined above, wherein (m2+m4) is an integer of 0,
a unit structure of Formula (3) as defined above,
a unit structure of Formula (4) as defined above, and
a unit structure of Formula (5) as defined above, wherein when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A), the ratio n3 of the unit structure of Formula (3) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, 0<n4≦0.4, 0<n5≦0.4, and 0.3<n2+n3+n4+n5≦1.0; and
the component (B) is a compound having a structure of Formula (6):
where:
R 11 is a hydrogen atom or a group of Formula (7):
where:
R 13 is a single bond or a —SO 2 — group;
R 14 is a C 1-10 alkyl group; and
m8 is an integer of 0 to 3;
R 12 is a C 1-10 substituted or unsubstituted alkyl group, a halogen group, or a C 1-10 alkoxy group;
m5 is an integer of 0 or 1, where when m5 is 0, m6 is an integer of 1 to 5, and m7 is an integer satisfying 0≦m7≦(5−m6), and when m5 is 1, m6 is an integer of 1 to 7 and m7 is an integer satisfying 0≦m7≦(7−m6); and
R 11 is a group of Formula (7) in an amount of 10 to 100% by mol, based on the number of moles of all —OR 11 groups contained in the structure of Formula (6).
3. A liquid crystal display device, comprising a planarization film formed from a positive resist composition comprising:
a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure;
a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and
a component (C): a solvent;
wherein:
the alkali-soluble polymer as the component (A) is:
a polymer comprising a unit structure of Formula (1):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5, m4 is an integer of 0 to 4, and (m2+m4) is an integer of 1 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4); and
when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0; or
a polymer comprising a unit structure of Formula (2) and a unit structure of Formula (3):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5;
m4 is an integer of 0 to 4;
(m2+m4) is an integer of 0 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4);
R 4 and R 5 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
Q 2 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A) and the ratio n3 of the unit structure of Formula (3) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, and 0.3≦n2+n3≦1.0; or
a polymer comprising:
a unit structure of Formula (1) as defined above, wherein (m2+m4) is an integer of 0,
optionally a unit structure of Formula (4), and
optionally a unit structure of Formula (5):
where:
R 6 and R 7 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
R 8 is a C 1-10 substituted or unsubstituted alkyl group, a C 3-6 epoxy group, a C 6-20 aryl group, or a combination thereof;
Q 3 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group;
R 9 and R 10 are individually a C 1-10 substituted or unsubstituted alkyl group, a C 1-6 hydroxyalkyl group, a hydroxy group, a halogen group, a carboxy group, or a C 1-10 alkoxy group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.3≦n1≦0.7, 0≦n4≦0.4, 0≦n5≦0.4, and 0.3≦n1+n4+n5≦1.0; or
a polymer comprising:
a unit structure of Formula (2) as defined above, wherein (m2+m4) is an integer of 0,
a unit structure of Formula (3) as defined above,
a unit structure of Formula (4) as defined above, and
a unit structure of Formula (5) as defined above, wherein when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A), the ratio n3 of the unit structure of Formula (3) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, 0<n4≦0.4, 0<n5≦0.4, and 0.3<n1+n4+n5≦1.0; and
the component (B) is a compound having a structure of Formula (6):
where:
R 11 is a hydrogen atom or a group of Formula (7):
where:
R 13 is a single bond or a —SO 2 — group;
R 14 is a C 1-10 alkyl group; and
m8 is an integer of 0 to 3;
R 12 is a C 1-10 substituted or unsubstituted alkyl group, a halogen group, or a C 1-10 alkoxy group;
m5 is an integer of 0 or 1, where when m5 is 0, m6 is an integer of 1 to 5, and m7 is an integer satisfying 0≦m7≦(5−m6), and when m5 is 1, m6 is an integer of 1 to 7 and m7 is an integer satisfying 0≦m7≦(7−m6); and
R 11 is a group of Formula (7) in an amount of 10 to 100% by mol, based on the number of moles of all —OR 11 groups contained in the structure of Formula (6).
4. An LED display device, comprising a planarization film formed from a positive resist composition comprising:
a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure;
a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and
a component (C): a solvent;
wherein:
the alkali-soluble polymer as the component (A) is:
a polymer comprising a unit structure of Formula (1):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5, m4 is an integer of 0 to 4, and (m2+m4) is an integer of 1 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4); and
when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0; or
a polymer comprising a unit structure of Formula (2) and a unit structure of Formula (3):
where:
R 1 is a halogen atom, an alkyl group, an alkoxy group, a thiol group, a cyano group, an amino group, an amide group, an alkylcarbonyl group, a thioalkyl group, or a combination thereof;
R 2 is a carboxy group or a hydroxy group;
R 3 is a hydrogen atom or a methyl group;
Q 1 is a single bond;
m2 is an integer of 0 to 5;
m4 is an integer of 0 to 4;
(m2+m4) is an integer of 0 to 9;
m1 is an integer satisfying 0≦m1≦(5−m2);
m3 is an integer satisfying 0≦m3≦(4−m4);
R 4 and R 5 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
Q 2 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A) and the ratio n3 of the unit structure of Formula (3) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, and 0.3≦n2+n3≦1.0; or
a polymer comprising:
a unit structure of Formula (1) as defined above, wherein (m2+m4) is an integer of 0,
optionally a unit structure of Formula (4), and
optionally a unit structure of Formula (5):
where:
R 6 and R 7 are individually a hydrogen atom, a methyl group, a carboxy group, or a C 1-3 alkylenecarboxy group;
R 8 is a C 1-10 substituted or unsubstituted alkyl group, a C 3-6 epoxy group, a C 6-20 aryl group, or a combination thereof;
Q 3 is a single bond, a C 1-3 alkylene group, or a C 6-20 arylene group;
R 9 and R 10 are individually a C 1-10 substituted or unsubstituted alkyl group, a C 1-6 hydroxyalkyl group, a hydroxy group, a halogen group, a carboxy group, or a C 1-10 alkoxy group; and
when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.3≦n1≦0.7, 0≦n4≦0.4, 0≦n5≦0.4, and 0.3≦n1+n4+n5≦1.0; or
a polymer comprising:
a unit structure of Formula (2) as defined above, wherein (m2+m4) is an integer of 0,
a unit structure of Formula (3) as defined above,
a unit structure of Formula (4) as defined above, and
a unit structure of Formula (5) as defined above, wherein when the total number of all unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n2 of the unit structure of Formula (2) constituting the polymer (A), the ratio n3 of the unit structure of Formula (3) constituting the polymer (A), the ratio n4 of the unit structure of Formula (4) constituting the polymer (A), and the ratio n5 of the unit structure of Formula (5) constituting the polymer (A) satisfy 0.2≦n2≦0.8, 0.1≦n3≦0.7, 0<n4≦0.4, 0<n5≦0.4, and 0.3<n2+n3+n4+n5≦1.0; and
the component (B) is a compound having a structure of Formula (6):
where:
R 11 is a hydrogen atom or a group of Formula (7):
where:
R 13 is a single bond or a —SO 2 — group;
R 14 is a C 1-10 alkyl group; and
m8 is an integer of 0 to 3;
R 12 is a C 1-10 substituted or unsubstituted alkyl group, a halogen group, or a C 1-10 alkoxy group;
m5 is an integer of 0 or 1, where when m5 is 0, m6 is an integer of 1 to 5, and m7 is an integer satisfying 0≦m7≦(5−m6), and when m5 is 1, m6 is an integer of 1 to 7 and m7 is an integer satisfying 0≦m7≦(7−m6); and
R 11 is a group of Formula (7) in an amount of 10 to 100% by mol, based on the number of moles of all —OR 11 groups contained in the structure of Formula (6).