Substrate storage container
A separate supporting body for supporting semiconductor wafers of φ450 mm is attached to the inner surface of either side wall of a container body. Each supporting body is formed of a front supporting piece that is projected laterally from a frame and horizontally retains the wafer on, at least, the side part in the front peripheral edge; and a rear supporting piece that is projected laterally from frame and horizontally retains the wafer on, at least, the side part in the rear peripheral edge. Front supporting piece is formed of a projected part that extends from the front of frame toward the front peripheral edge of the semiconductor wafer and a curved part that extends rearwards from projected part along the peripheral edge of the semiconductor wafer.
1. A substrate storage container comprising:
a container body configured to be formed of a front open box and accommodate wafers having a diameter of 300 nm or greater; and
a door configured to open and close an open front of the container body, and
the container body including supporting bodies that can support wafers on both interior side walls thereof, and
the door comprising:
a casing configured to be engaged with the open front of the container body;
a front plate configured to cover an open front of the door; and
a locking mechanism configured to be interposed between the casing and the front plate, and
the supporting body respectively comprising:
a frame configured to oppose a direction of an internal side of the container body; and
supporting members configured to be projected from the frame and support the wafers, and
the supporting members being respectively formed of:
a front supporting piece that is projected from the frame and approximately horizontally retains the wafer on, at least, a side part of a front peripheral edge; and
a rear supporting piece that is projected from the frame and approximately horizontally retains the wafer on, at least, a side part of a rear peripheral edge; and
wherein the front supporting piece is formed of: a projected part that extends from the front of the frame toward the front peripheral edge of the wafer; and a curved part extends rearwards from the projected part along the peripheral edge of the wafer, and
wherein the frame of the supporting body includes a pair of top and bottom crossrails arranged apart from and opposing to each other, and a pair of stiles arranged vertical at the front and rear between the pair of crossrails, and
wherein a left-and-right direction positioning attachment portion for positioning with respect to the left and right direction and a vertical direction positioning attachment portion for positioning with respect to the vertical direction are respectively provided on the pair of top and bottom crossrails, and
wherein front retainers configured to hold the side part of the front peripheral edge of the wafer are attached to a back surface of the casing of the door, and
wherein the locking mechanism of the door is made up of: rotary plates configured to be rotatably supported on the casing of the door; side plates configured to slide upwards and downwards in accordance with rotation of each rotary plate; and engagement claws configured to be projected from the casing in accordance with a slide of each slide plate, and
wherein the locking mechanism is disposed in front of the front retainers, and
wherein the frame of the supporting body, the front supporting piece, and the rear supporting piece are integrally molded with a hollow formed between the frame and the front supporting piece.
2. The substrate storage container according to claim 1 , wherein the frame of the supporting body includes a height adjustor for adjusting the height.
3. The substrate storage container according to claim 1 ,
wherein the frame of the supporting body is given in an approximately laterally long form having a sectioning joint piece between the opposing top and bottom parts, and
wherein the rear of the curved part of the front supporting piece and the front end of the rear supporting piece are joined to the sectioning joint piece.
4. The substrate storage container according to claim 1 ,
wherein a reinforcing joint piece for supporting the rear supporting piece is provided between the top and bottom parts of the frame of the supporting body.
5. The substrate storage container according to claim 1 ,
wherein the container body is formed of a front open box with a front opening,
wherein a pair of supporting structures for supporting bodies are provided on both the interior side walls of the container body, and
wherein the supporting structure comprises:
a pair of top and bottom supporting rails that abut the vertical direction positioning attachment portion of the supporting body to position the supporting body with respect to the height direction; and
an attachment portion for positioning the supporting body with respect to the left-and-right direction.
6. The substrate storage container according to claim 5 ,
wherein separate supporting structures are attached afterwards to both the interior side walls of the container body.
7. The substrate storage container according to claim 5 ,
wherein the supporting structures are integrally formed on both the interior side walls of the container body.
8. The substrate storage container according to claim 5 ,
wherein the supporting rail of the supporting structure is formed with a cutout that fits with the positioning rib formed on the supporting body and an engagement claw that engages an engagement hook formed in the supporting body.
9. The substrate storage container according to claim 1 , wherein at least one falling stopper for the supporting body is formed inside the container body.
10. A substrate storage container comprising:
a container body configured to be formed of a front open box and accommodate wafers having a diameter of 300 mm or greater; and
a door configured to open and close an open front of the container body, and
the container body including supporting bodies that can support wafers on both interior side walls thereof, and
the door comprising:
a casing configured to be engaged with the open front of the container body;
a front plate configured to cover an open front of the door; and
a locking mechanism configured to be interposed between the casing and the front plate, and the supporting body respectively comprising:
a frame configured to oppose a direction of an internal side of the container body; and
supporting members configured to be projected from the frame and support the wafers, and
wherein the frame of the supporting body includes a pair of top and bottom crossrails arranged apart from and opposing to each other, and a pair of stiles arranged vertical at the front and rear between the pair of crossrails,
the supporting members being respectively include:
a front-side supporting rib that is projected from the frame and approximately horizontally retains the wafer on, at least, a side part of a front peripheral edge; and
a rear-side supporting rib that is projected from the frame and approximately horizontally retains the wafer on, at least, a side part of a rear peripheral edge, and
wherein the front-side supporting rib and the rear-side supporting rib are integrally formed, and
wherein the front-side supporting rib is formed of: a projected part that extends from the front of frame toward the front peripheral edge of the wafer; and a curved part that extends rearwards from the projected part along the peripheral edge of the wafer, and
wherein front retainers configured to hold the side part of the front peripheral edge of the wafer are attached to a back surface of the casing of the door, and
wherein the locking mechanism of the door is made up of: rotary plates configured to be rotatably supported on the casing of the door; slide plates configured to slide upwards and downwards in accordance with rotation of each rotary plate; and engagement claws configured to be projected from the casing in accordance with a slide of each slide plate, and
wherein the locking mechanism is disposed in front of the front retainers.