Sample inspection methods, systems and components
The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
1. A method, comprising:
detecting electrons generated from a sample for a first period of time;
forming a first image of the sample based on the detected electrons;
detecting an abundance of a first plurality ions scattered from a region of the sample, the region of the sample being based on the first image; and
detecting a second plurality of ions scattered from the sample based on an energy of the second plurality of ions for a second period of time which is greater than the first period of time.
2. The method of claim 1 , further comprising forming a second image of the sample based on the detected abundance of the first plurality of ions.
3. The method of claim 2 , wherein a region of the sample from which the second plurality of ions is detected is based on the second image.
4. The method of claim 2 , wherein the region of the sample from which the second plurality of ions is detected is also based on the first image.
5. The method of claim 2 , further comprising forming a third image of the sample based on the energy abundance of the second plurality of ions.
6. The method of claim 5 , wherein the first plurality of ions is detected for a third period of time, the third period of time is greater than the first period of time, and the third period of time is less than the first period of time.
7. The method of claim 1 , wherein the second plurality of ions is detected after the first plurality of ions.
8. The method of claim 1 , wherein the second plurality of ions scattered from the sample is detected based on an angle of the second plurality of ions.
9. The method of claim 1 , further comprising forming a second image of the sample based on the energy abundance of the second plurality of ions.
10. The method of claim 1 , wherein the second plurality of ions is detected after the first plurality of ions is detected.
11. The method of claim 1 , wherein the first plurality of ions is detected after the electrons are detected.
12. The method of claim 1 , wherein the first plurality of ions is detected for a third period of time, the third period of time is greater than the first period of time, and the third period of time is less than the first period of time.
13. A method, comprising:
interacting charged particles with a sample to generate electrons;
detecting the electrons for a first period of time;
forming a first image based on the detected electrons;
after detecting the electrons, detecting an abundance of a first plurality of ions scattered from the sample for a second period of time;
forming a second image based on the first plurality of scattered ions; and
after detecting the first plurality of scattered ions, detecting a second plurality of ions scattered from the sample based on energy of the second plurality of ions for a third period of time,
wherein the second period of time is greater than the first period of time, and the third period of time is greater than the second period of time.
14. The method of claim 13 , wherein the charged particles comprise ions.
15. The method of claim 13 , wherein the charged particles comprise ions generated by a gas field ion source.
16. The method of claim 13 , wherein the charged particles comprise electrons.
17. The method of claim 13 , wherein a region of the sample from which the first plurality of ions is detected is based on the first image, and a region of the sample from which the second plurality of ions is detected is based on the second image.
18. The method of claim 17 , wherein the region of the sample from which the second plurality of ions is detected is also based on the first image.
19. A method, comprising:
detecting electrons generated from a sample;
forming a first image of the sample based on the detected electrons;
detecting an abundance of a first plurality ions scattered from a region of the sample, the region of the sample being based on the first image; and
detecting a second plurality of ions scattered from the sample based on an energy of the second plurality of ions,
wherein the electrons are detected for a first period of time and the first plurality of ions is detected for a second period of time different from the first period of time, wherein the second plurality of ions is detected for a third period of time, and wherein the second period of time is greater than the first period of time and wherein the third period of time is larger than the second period of time.
20. The method of claim 19 , further comprising forming a second image of the sample based on the detected abundance of the first plurality of ions.
21. The method of claim 20 , wherein a region of the sample from which the second plurality of ions is detected is based on the second image.
22. The method of claim 20 , wherein the region of the sample from which the second plurality of ions is detected is also based on the first image.
23. The method of claim 19 , wherein the second plurality of ions is detected after the first plurality of ions.
24. The method of claim 19 , wherein the second plurality of ions scattered from the sample is detected based on an angle of the second plurality of ions.
25. A method, comprising:
detecting electrons generated from a sample for a first period of time;
forming a first image of the sample based on the detected electrons;
detecting an abundance of a first plurality ions scattered from a region of the sample for a second period of time which is greater than the first period of time, the region of the sample being based on the first image; and
detecting a second plurality of ions scattered from the sample based on an energy of the second plurality of ions.
26. The method of claim 25 , further comprising forming a second image of the sample based on the detected abundance of the first plurality of ions.
27. The method of claim 26 , further comprising forming a third image of the sample based on the detected abundance of the second plurality of ions.
28. The method of claim 25 , further comprising forming a third image of the sample based on the detected abundance of the second plurality of ions.
29. The method of claim 25 , wherein the second plurality of ions is detected after the first plurality of ions is detected.