IP Library Granted Patent US 8,844,511
Granted Patent B2
US 8,844,511 · App. 13/009,957 · Granted Sep 30, 2014

Method for slicing a multiplicity of wafers from a crystal composed of semiconductor material

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Quick Facts
Patent No.
US 8,844,511
App. No.
13/009,957
Granted
Sep 30, 2014
Kind
B2
Abstract

A method for slicing a plurality of wafers from a crystal includes providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge. The crystal is fixed on a table and guided through a wire gang defined by sawing wire so as to form the wafers. The guiding is provided by a relative movement between the table and the wire gang such that entry sawing or exit sawing using the sawing wire occurs in a vicinity of the at least one pulling edge of the crystal.

Claims (9)

1. A method for slicing a plurality of wafers from a crystal comprising:

providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge;

fixing the crystal on a table;

guiding the crystal through a wire gang defined by sawing wire so as to form the wafers, the guiding provided by a relative movement between the table and the wire gang such that the wire gang initiates or completes cutting of crystal in a vicinity of a selected pulling edge of the crystal.

2. The method recited in claim 1 , wherein the crystal includes silicon and has an orientation of <100>, <110> or <111>.

3. The method recited in claim 2 , wherein the guiding is conducted such that the sawing wire exits the crystal at the selected pulling edge of the crystal so as to form wafers having a reduced warp.

4. The method recited in claim 2 , wherein the guiding is conducted such that the sawing wire enters the crystal at the selected pulling edge of the crystal so as to form wafers having increased warp.

5. The method recited in claim 1 , wherein the guiding is conducted such that the sawing wire exits the crystal at the selected pulling edge of the crystal so as to form wafers having a reduced warp.

6. The method recited in claim 1 , wherein the guiding is conducted such that the sawing wire enters the crystal at the selected pulling edge of the crystal so as to form wafers having increased warp.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE DATE OF THE CHANGE OF ADDRESS FROM 03/12/2020 TO 12/03/2020 PREVIOUSLY RECORDED AT REEL: 056719 FRAME: 0881. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jul 1, 2021
From: SILTRONIC AG
To: SILTRONIC AG
Reel/Frame 057561/0451 →
CHANGE OF ADDRESS Recorded Jun 30, 2021
From: SILTRONIC AG
To: SILTRONIC AG
Reel/Frame 056719/0881 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2011
From: KAESER, MAXIMILIAN; BLANK, ALBERT
To: SILTRONIC AG
Reel/Frame 025667/0289 →