Roll-to-roll imprint lithography and purging system
View Patent ↗Droplets of polymerizable material may be patterned on a film sheet using a roll-to-roll system. The droplets of polymerizable material may be dispensed on the film sheet such that a substantially continuous patterned layer may be formed on the film sheet. A contact system provides for smooth fluid front progression the polymerizable material during imprinting. A gas purging system may be positioned during imprinting. Gas purging systems may provide for purging in parallel as fluid front of polymerizable material moves through roll-to-roll system.
1. A method of patterning polymerizable material on a film sheet comprising the steps of:
(a) depositing a polymerizable material on a patterning area of the film sheet;
(b) positioning the patterning area of the film sheet with the deposited polymerizable material in superimposition with a template, the template having first and second opposing edges;
(c) then contacting the deposited polymerizable material with the template;
(d) contacting the film sheet opposite the patterning area with a contact system, with the contact system oriented parallel to the first and second edges of the template;
translating the contact system along the film sheet from the first edge of the template to the second edge of the template;
(e) solidifying the polymerizable material to form a patterned layer; and
(f) separating the template from the patterned layer.
2. The method of claim 1 wherein the contact system is a roller with an axis of rotation parallel to the first and second edges of the template.
3. The method of claim 1 wherein the separating step further comprises translating the contact system from the second edge of the template back to the first edge of the template.
4. The method of claim 1 wherein the translation of the contact system from the first edge of the template to the second edge of the template creates a fluid front formed of the polymerizable material that progresses from a first side of the patterned area to a second side of the patterned area.
5. The method of claim 4 further comprising lowering a portion of the film sheet relative to the template to create an open area between the film sheet and the template.
6. The method of claim 5 further comprising providing a gas purging system within the open area that provides gas at the fluid front.
7. The method of claim 6 wherein the gas purging system is moveable relative to the fluid front.
8. The method of claim 1 further comprising the step of repositioning the film sheet after separating the template from the patterned layer to a location relative to the template such that second patterned layer can be formed that is continuous with the first patterned layer.
9. The method of claim 8 wherein the deposition of the polymerizable material occurs at a gap distance from the first edge of the template, and wherein the film sheet is repositioned over a distance at least equal to the gap distance.
10. The method of claim 1 wherein the deposition of the polymerizable material occurs at a distance from the first edge of the template that is equivalent to the distance between the first and second template edges.
11. The method of claim 1 further comprising at least two templates and wherein the at least two templates are positioned at a distance relative to each other that provides for continuous patterning of the film sheet.
12. The method of claim 11 wherein the two templates are positioned at a distance equal to three times the length of the patterning area.
13. A method of patterning polymerizable material on a film sheet comprising the steps of:
(a) depositing a polymerizable material on a patterning area of the film sheet;
(b) contacting the deposited polymerizable material with a template, the template having first and second edges;
(c) contacting the film sheet opposite the patterning area with a roller having an axis of rotation parallel to the first and second edges of the template;
(d) translating the roller along the film sheet from the first edge of the template to the second edge of the template;
(e) solidifying the polymerizable material to form a patterned layer; and
(f) separating the template from the patterned layer.
14. The method of claim 13 wherein the contacting the deposited polymerizable material with a template further comprises applying a force to the template.
15. The method of claim 13 wherein the contacting the deposited polymerizable material with a template further comprises applying a force to the template.
16. The method of claim 13 wherein the translation of the roller from the first edge of the template to the second edge of the template creates a fluid front formed of the polymerizable material that progresses from a first side of the patterned area to a second side of the patterned area, and wherein a purging gas is provided at the fluid front.
17. The method of claim 16 wherein the purging gas is provided by a gas purging system that is moveable relative to the fluid front.
18. A method of patterning polymerizable material on a film sheet comprising the steps of:
(a) depositing a polymerizable material on a patterning area of the film sheet;
(b) contacting the deposited polymerizable material with a template the template having first and second edges;
(c) contacting the film sheet opposite the patterning area with a roller having an axis of rotation parallel to the first and second edges of the template;
(d) translating the roller along the film sheet from the first edge of the template to the second edge of the template;
(e) solidifying the polymerizable material to form a patterned layer; and
(f) translating the roller from second edge of the template to the first edge of the template to separate the template from the patterned layer.
19. The method of claim 18 wherein the contacting the deposited polymerizable material with a template further comprises applying a force to the template.
20. The method of claim 18 wherein the contacting the deposited polymerizable material with a template further comprises applying a force to the template.
21. The method of claim 18 wherein the translation of the roller from the first edge of the template to the second edge of the template creates a fluid front formed of the polymerizable material that progresses from a first side of the patterned area to a second side of the patterned area, and wherein a purging gas is provided at the fluid front.
22. The method of claim 21 wherein the purging gas is provided by a gas purging system that is moveable relative to the fluid front.