Acoustic sensor
An acoustic sensing element has a substrate that includes a back chamber, a vibration electrode plate that is provided in a surface of the substrate while being opposite an upper surface opening of the back chamber, and a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate. The acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate. A lower surface of the back chamber is closed into a pouched shape by the substrate.
1. An acoustic sensing element comprising:
a substrate that includes a back chamber;
a vibration electrode plate that is provided on an upper side of the substrate while being opposite an upper surface opening of the back chamber; and
a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate,
wherein the acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate,
wherein the substrate is formed by joining a sub-substrate to a lower surface of a main substrate having a through-hole that pierces the main substrate from a front surface to a rear surface, and
wherein a lower surface of the through-hole is closed by the sub-substrate, thereby forming the back chamber by a space including the through-hole, a lower surface of the back chamber being closed into a pouched shape.
2. The acoustic sensing element according to claim 1 , wherein a recess is formed in the sub-substrate while communicated with the through-hole, and the back chamber is formed by the through-hole and the recess.
3. The acoustic sensing element according to claim 1 , wherein the main substrate and the sub-substrate are joined by a method in which a bonding agent is not used.
4. The acoustic sensing element according to claim 1 , wherein the main substrate and the sub-substrate are made of materials whose linear expansion coefficients are substantially equal to each other.
5. An acoustic sensor, wherein a lower surface of the acoustic sensing element according to claim 1 is stuck to an upper surface of a base substrate by a bonding agent, and a cover is attached to the upper surface of the base substrate such that the acoustic sensing element is covered therewith.