MEMS memory microprobe and recording apparatus
View Patent ↗According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.
1. A Micro Electro Mechanical Systems (MEMS) memory microprobe arranged to oppose a recording medium, the microprobe comprising:
a probe tip comprising:
a plurality of electrodes; and
a plurality of support portions,
wherein one or more of the electrodes and one or more of the support portions are alternately arranged and form a first probe tip surface and a second probe tip surface intersecting with each other,
wherein the first probe tip surface comprises first electrode surfaces of the one or more of the electrodes and first support portion surfaces of the one or more of the support portions,
wherein the second probe tip surface comprises second electrode surfaces of the one or more of the electrodes and second support portion surfaces of the one or more of the support portions, and
wherein the first probe tip surface opposes the recording medium;
a lever providing at least one of electrical connection or mechanical connection with the probe tip; and
a base providing at least one of electrical connection or mechanical connection with the lever.
2. The microprobe according to claim 1 , wherein a material of the electrodes is harder than a material of the support portions.
3. The microprobe according to claim 1 , further comprising insulating layers sandwiched between the electrodes and the support portions.
4. The microprobe according to claim 1 , wherein arbitrary sections of the probe tip parallel to the first probe tip surface are identical to each other.
5. The microprobe according to claim 1 , wherein the electrodes are arranged in an array pattern along a direction parallel to a probe scan direction as a relative moving direction of the probe tip with respect to the recording medium.
6. The microprobe according to claim 1 , wherein the lever comprises a first lever which supports the probe tip from a first direction, and a second lever which supports the probe tip from a second direction opposite to the first direction.
7. A recording apparatus comprising:
a recording medium; and
a microprobe arranged to oppose the recording medium, the microprobe comprising:
a probe tip comprising:
a plurality of electrodes; and
a plurality of support portions,
wherein one or more of the electrodes and one or more of the support portions are alternately arranged and form a a first probe tip surface and a second probe tip surface intersecting with each other,
wherein the first probe tip surface comprises first electrode surfaces of the one or more of the electrodes and first support portion surfaces of the one or more of the support portions,
wherein the second probe tip surface comprises second electrode surfaces of the one or more of the electrodes and second support portion surfaces of the one or more of the support portions, and
wherein the first probe tip surface opposes the recording medium;
a lever providing at least one of electrical connection or mechanical connection with the probe tip; and
a base providing at least one of electrical connection or mechanical connection with the lever.
8. The apparatus according to claim 7 , wherein a material of the electrodes is harder than a material of the support portions.
9. The apparatus according to claim 7 , further comprising insulating layers sandwiched between the electrodes and the support portions.
10. The apparatus according to claim 7 , wherein arbitrary sections of the probe tip parallel to the first probe tip surface are identical to each other.
11. The apparatus according to claim 7 , wherein the electrodes are arranged in an array pattern along a direction parallel to a probe scan direction as a relative moving direction of the probe tip with respect to the recording medium.
12. The apparatus according to claim 7 , wherein the lever comprises a first lever which supports the probe tip from a first direction, and a second lever which supports the probe tip from a second direction opposite to the first direction.