Semiconductor device having an airbridge and method of fabricating the same
View Patent ↗A method of forming a device having an airbridge on a substrate includes forming a plated conductive layer of the airbridge over at least a photoresist layer on a portion of the substrate, the plated conductive layer defining a corresponding opening for exposing a portion of the photoresist layer. The method further includes undercutting the photoresist layer to form a gap in the photoresist layer beneath the plated conductive layer at the opening, and forming an adhesion layer on the plated conductive layer and the exposed portion of the photoresist layer, the adhesion layer having a break at the gap beneath the plated conductive layer. The photoresist layer and a portion of the adhesion layer formed on the exposed portion of the photoresist layer is removed, which includes etching the photoresist layer through the break in the adhesion layer. An insulating layer is formed on at least the adhesion layer, enhancing adhesion of the insulating layer to the plated conductive layer.
1. A method of forming a device having an airbridge on a substrate, the method comprising:
forming a plated conductive layer of the airbridge over at least a photoresist layer on a portion of the substrate, the plated conductive layer defining a corresponding opening for exposing a portion of the photoresist layer;
undercutting the photoresist layer to form a gap in the photoresist layer beneath the plated conductive layer at the opening;
forming an adhesion layer on the plated conductive layer and the exposed portion of the photoresist layer, the adhesion layer having a break at a gap beneath the plated conductive layer;
removing the photoresist layer and a portion of the adhesion layer formed on the exposed portion of the photoresist layer, the removing comprising etching the photoresist layer through the break in the adhesion layer; and
forming an insulating layer on at least the adhesion layer, which enhances adhesion of the insulating layer to the plated conductive layer.
2. The method of claim 1 , wherein the adhesion layer covers at least a portion of sidewalls of the opening in the plated conductive layer.
3. The method of claim 1 , wherein the adhesion layer formed on the exposed portion of the photoresist layer is lifted off by the etching of the photoresist layer.
4. The method of claim 1 , wherein undercutting the photoresist layer comprises applying oxygen plasma to the exposed portion of the photoresist layer.
5. The method of claim 1 , wherein the plated conductive layer comprises gold, and the insulating layer comprises silicon nitride.
6. The method of claim 5 , wherein the adhesion layer comprises titanium.
7. The method of claim 5 , wherein the adhesion layer comprises tantalum.
8. The method of claim 5 , wherein the adhesion layer comprises titanium oxide.
9. The method of claim 1 , further comprising:
forming a conductive seed layer electrically connected to the substrate and the photoresist layer; and
forming the plated conductive layer on the conductive seed layer, the opening in the plated conductive layer initially exposing a portion of the conductive seed layer.
10. The method of claim 9 , further comprising:
etching the exposed portion of the conductive seed layer to expose the exposed portion of the photoresist layer in the opening in the plated conductive layer before undercutting the photoresist layer to form the gap beneath the plated conductive layer.
11. The method of claim 10 , wherein the conductive seed layer comprises plated gold.
12. The method of claim 11 , further comprising:
forming a conductive lower layer electrically connected to the substrate and the photoresist layer; and
forming the conductive seed layer on the conductive lower layer,
wherein the conductive lower layer comprises titanium tungsten.