Substrate processing apparatus and substrate processing method
A substrate subjected to back surface cleaning by a back surface cleaning processing unit is held by a hand of an interface transport mechanism and transported to a cooling unit. The substrate whose temperature has been adjusted by the cooling unit is held by a hand of the interface transport mechanism and transported to an exposure device. The substrate subjected to exposure processing by the exposure device is held by a hand of the interface transport mechanism and transported from the exposure device to a substrate platform.
1. A substrate processing apparatus that is arranged adjacent to an exposure device, comprising:
a processing section for subjecting a top surface of a substrate to processing; and
an interface for receiving and transferring the substrate between said processing section and said exposure device, wherein
said processing section includes a photosensitive film forming unit arranged to form a photosensitive film made of a photosensitive material on the top surface of the substrate,
said interface includes
a back surface cleaning unit arranged to clean a back surface of the substrate after formation of the photosensitive film by said photosensitive film forming unit and before exposure processing by said exposure device,
a temperature adjuster arranged to adjust a temperature of the substrate,
a platform on which the substrate after said exposure processing is placed, and
a transport device that includes first, second and third holders, each of which transports the substrate while holding the substrate, and
said transport device is configured to transport the substrate after back surface cleaning by said back surface cleaning unit to said temperature adjuster, while holding the substrate after the back surface cleaning using said second holder, transport the substrate before the exposure processing from said temperature adjuster to said exposure device while holding the substrate before the exposure processing using said first holder, and transport the substrate after the exposure processing from said exposure device to said platform while holding the substrate after the exposure processing using said third holder.
2. The substrate processing apparatus according to claim 1 , wherein
said temperature adjuster includes
a housing arranged to surround the substrate, and
a gas supplier arranged to supply dry gas into said housing.
3. The substrate processing apparatus according to claim 1 , wherein
said transport device includes first and second transport units,
said first transport unit includes said first holder, said second holder and said third holder, and
said second transport unit includes
a fourth holder arranged to transport the substrate after the formation of said photosensitive film from said processing section to said interface while holding the substrate after the formation of said photosensitive film, and
a fifth holder arranged to transport the substrate after said exposure processing while holding the substrate after said exposure processing in said interface.
4. The substrate processing apparatus according to claim 3 , wherein said third holder is arranged below said first and second holders.
5. The substrate processing apparatus according to claim 3 , wherein said first holder is arranged above said second holder.
6. The substrate processing apparatus according to claim 1 , wherein
said transport device includes first and second transport units,
said first transport unit includes said first holder and said third holder,
said second transport unit includes
said second holder,
a fourth holder arranged to transport the substrate after the formation of said photosensitive film from said processing section to said interface while holding the substrate after the formation of said photosensitive film, and
a fifth holder arranged to transport the substrate after the formation of said photosensitive film to said back surface cleaning unit while holding the substrate after the formation of said photosensitive film in said interface.
7. The substrate processing apparatus according to claim 6 , wherein said first holder is arranged above said third holder.
8. The substrate processing apparatus according to claim 6 , wherein said second holder is arranged above said fourth and fifth holders.