Touch sensor configuration
A touch sensor configuration contains an optically transparent substrate, at least one optically transparent touch sensor element formed on the substrate and has at least one electrically conductive, transparent layer, and at least one contacting structure for the electrical contacting of the electrically conductive, transparent layer. The contacting structure has in direct contact with the electrically conductive, transparent layer at least one layer of Mo x Ta y with 0.02≦y≦0.15.
1. A touch sensor configuration, comprising:
an optically transparent substrate;
at least one optically transparent touch sensor element formed on said substrate and having at least one electrically conductive, transparent layer; and
at least one contacting structure for electrical contacting of said electrically conductive, transparent layer, said contacting structure having in direct contact with said electrically conductive, transparent layer at least one layer of Mo x Ta y with 0.02≦y≦0.15.
2. The touch sensor configuration according to claim 1 , wherein 0.03≦y≦0.09.
3. The touch sensor configuration according to claim 1 , wherein said contacting structure is of a multilayer structure and has at least one layer of Al, Cu, Ag, Au, an Al alloy with an Al content ≧90 atomic percent, a Cu alloy with a Cu content ≧90 atomic percent, an Ag alloy with an Ag content ≧90 atomic percent or an Au alloy with an Au content ≧90 atomic percent.
4. The touch sensor configuration according to claim 1 , wherein said contacting structure has at least one contact terminal for connection to an electronic activation and evaluation unit and an exposed surface of said contact terminal is formed by said at least one layer of Mo x Ta y with 0.02≦y≦0.15.
5. The touch sensor configuration according to claim 1 , wherein the touch sensor configuration forms part of a touch sensor screen.
6. The touch sensor configuration according to claim 1 , wherein said optically transparent touch sensor element is one of a plurality of touch sensor elements disposed in a grid.
7. The touch sensor configuration according to claim 1 , wherein said at least one electrically conductive, transparent layer has one of a transparent conductive oxide, a transparent, conductive polymer or a coating of carbon nano-tubes.
8. The touch sensor configuration according to claim 1 , wherein said optically transparent substrate has a rear side facing away from the touch sensor configuration, and forms a substrate for at least one component of a liquid crystal display.
9. A method, which comprises the step of:
forming, via a sputtering target, a contacting structure in direct contact with an electrically conductive, transparent layer of an optically transparent touch sensor element of a touch sensor configuration that is formed on an optically transparent substrate, the sputtering target containing Mo x Ta y with 0.02≦y≦0.15.
10. The method according to claim 9 , which further comprises setting y in the range of 0.03≦y≦0.09.
11. A method, which comprises the step of:
providing and using an etching solution for structuring a contacting structure for contacting an electrically conductive, transparent layer, the contacting structure having at least one layer of Mo x Ta y with 0.02≦y≦0.15 and the etching solution having at least one of phosphoric acid, acetic acid or nitric acid as solution constituents.
12. The method according to claim 11 , which further comprises setting a proportion of phosphoric acid to be 60-90 percent by weight, a proportion of acetic acid to be 0-20 percent by weight and a proportion of nitric acid to be 1-12 percent by weight.