Semiconductor device with embedded low-K metallization
View Patent ↗Generally, the subject matter disclosed herein relates to a semiconductor device with embedded low-k metallization. A method is disclosed that includes forming a plurality of copper metallization layers that are coupled to a plurality of logic devices in a logic area of a semiconductor device and, after forming the plurality of copper metallization layers, forming a plurality of capacitors in a memory array of the semiconductor device. The capacitors are formed using a non-low-k dielectric material (k value greater than 3), while the copper metallization layers are formed in layers of low-k dielectric material (k value less than 3). A semiconductor device is also disclosed which includes a plurality of logic devices, a memory array comprising a plurality of capacitors, a conductive contact plate coupled to the plurality of capacitors, and a plurality of copper metallization layers coupled to the logic devices, wherein the plurality of copper metallization layers are positioned at a level that is below a level of a bottom surface of the contact plate. A material other than a low-k dielectric material is positioned between the plurality of capacitors in the memory array.
1. A method, comprising:
forming a plurality of low-k dielectric layers within a logic area and a memory array of a semiconductor device;
forming an etch stop layer above said plurality of low-k dielectric layers;
forming a plurality of copper metallization layers that are conductively coupled to a plurality of logic devices in said logic area of said semiconductor device, wherein said copper metallization layers are positioned in said low-k dielectric layers; and
after forming said plurality of copper metallization layers, forming a plurality of capacitors in a memory array of said semiconductor device, wherein forming said plurality of capacitors comprises:
forming a plurality of openings in said etch stop layer in the area above said memory array; and
performing at least one etching process through said openings in said etch stop layer to remove said low-k dielectric layers from within said memory array.
2. The method of claim 1 , further comprising forming a trench around said memory array and forming a conductive contact plate that is conductively coupled to said plurality of capacitors, wherein a portion of said conductive contact plate extends into said trench.
3. The method of claim 2 , wherein said conductive contact plate extends between said plurality of capacitors in said memory array.
4. The method of claim 1 , wherein a material other than a low-k dielectric material is positioned between said plurality of capacitors in said memory array.
5. The method of claim 1 , wherein forming said plurality of copper metallization layers comprises forming a plurality of copper lines and copper vias.
6. The method of claim 1 , further comprising forming a conductive contact plate that is conductively coupled to said plurality of capacitors, wherein said conductive contact plate has a bottom surface that is at a level that is above a level of an uppermost surface of said plurality of copper metallization layers.
7. The method of claim 1 , wherein forming said plurality of capacitors comprises forming a plurality of double sided capacitors.
8. The method of claim 1 , wherein said capacitors are formed using a non-low-k dielectric material.
9. A method, comprising:
forming a plurality of low-k dielectric layers within a logic area and a memory array of a semiconductor device;
forming an etch stop layer above said plurality of low-k dielectric layers;
forming a plurality of copper metallization layers that are conductively coupled to a plurality of logic devices in said logic area of said semiconductor device, wherein said copper metallization layers are positioned in said low-k dielectric layers;
after forming said plurality of copper metallization layers, forming a plurality of capacitors in a memory array of said semiconductor device, wherein forming said plurality of capacitors comprises:
forming a plurality of openings in said etch stop layer in the area above said memory array; and
performing at least one etching process through said openings in said etch stop layer to remove said low-k dielectric layers from within said memory array;
forming a trench around said memory array; and
forming a conductive contact plate that is conductively coupled to said plurality of capacitors, wherein said conductive contact plate has a bottom surface that is at a level that is above a level of an uppermost surface of said plurality of copper metallization layers, and wherein a portion of said conductive contact plate extends into said trench.
10. The method of claim 9 , wherein said capacitors are formed using a non-low k dielectric material.
11. The method of claim 9 , wherein a material other than a low-k dielectric material is positioned between said plurality of capacitors in said memory array.
12. A semiconductor device, comprising:
an area comprising a plurality of logic devices;
a memory array comprising a plurality of capacitors;
a conductive contact plate conductively coupled to said plurality of capacitors, said conductive contact plate having a bottom surface; and
a plurality of copper metallization layers conductively coupled to said logic devices, said plurality of copper metallization layers being positioned at a level that is below a level of said bottom surface of said conductive contact plate, wherein said copper metallization layers are positioned in a plurality of layers of low-k dielectric material, each of which is separated by an etch stop layer within said area comprising logic devices.
13. The device of claim 12 , further comprising a trench surrounding said memory array, wherein a portion of said conductive contact plate extends into said trench.
14. The device of claim 13 , wherein said trench extends into a dielectric layer positioned above a substrate on which said memory array is positioned and a bottom of said trench does not touch a conductive contact to a memory device in said memory array.
15. The device of claim 12 , wherein a material other than a low-k dielectric material is positioned between said plurality of capacitors in said memory array.
16. The device of claim 12 , wherein said conductive contact plate extends between said plurality of capacitors in said memory array.
17. The device of claim 12 , wherein said plurality of capacitors are double sided capacitors.
18. The device of claim 12 , wherein said plurality of copper metallization layers are formed prior to the formation of said plurality of capacitors.
19. The device of claim 12 , wherein said capacitors are formed using a non-low-k dielectric material.
20. The device of claim 12 , wherein said etch stop layers do not extend into said memory array.
21. A semiconductor device, comprising:
an area comprising a plurality of logic devices;
a memory array comprising a plurality of capacitors, said capacitors being comprised of a non-low-k dielectric material;
a conductive contact plate conductively coupled to said plurality of capacitors, said conductive contact plate having a bottom surface;
a plurality of copper metallization layers conductively coupled to said logic devices, said plurality of copper metallization layers being positioned at a level that is below a level of said bottom surface of said conductive contact plate, wherein said copper metallization layers are positioned in a plurality of layers of low-k dielectric material, each of which is separated by an etch stop layer within said area comprising logic devices; and
a trench surrounding said memory array, wherein a portion of said conductive contact plate extends into said trench.
22. The device of claim 21 , wherein said trench extends into a dielectric layer positioned above a substrate on which said memory array is positioned and a bottom of said trench does not touch a contact to a memory device in said memory array.
23. The device of claim 21 , wherein a material other than a low-k dielectric material is positioned between said plurality of capacitors in said memory array.
24. The device of claim 21 , wherein said conductive contact plate extends between said plurality of capacitors in said memory array.