Electronic device and manufacturing method
View Patent ↗Provided is an electronic device that generates an output signal corresponding to an input signal, comprising a signal processing section that receives the input signal and outputs the output signal corresponding to the input signal, and a floating electrode that accumulates a charge by being irradiated by an electron beam. The signal processing section adjusts electric characteristics of the output signal according to a charge amount accumulated in the floating electrode, and includes a transistor formed on the semiconductor substrate between an input terminal that receives the input signal and an output terminal that outputs the output signal. The floating electrode is formed between a gate electrode of the transistor and the semiconductor substrate.
1. An electronic device that generates an output signal corresponding to an input signal, comprising:
a signal processing section including a transistor formed on a semiconductor substrate between an input terminal that receives the input signal and an output terminal that outputs the output signal corresponding to the input signal, wherein a gate electrode of the transistor is formed on a top surface of the semiconductor substrate;
a floating electrode that accumulates a charge by being irradiated by an electron beam, wherein the floating electrode (i) is formed on the top surface of the semiconductor substrate, (ii) is formed at a distance from the gate electrode of the transistor in a direction perpendicular to a channel direction of the transistor, and (iii) run parallel to the gate electrode of the transistor;
an insulating film that covers a top surface of the floating electrode;
a through-hole formed in the insulating film such that the electron beam can irradiate the floating electrode through the through-hole; and
a guard ring having a ring shape that surrounds the through-hole on a top surface of the insulating film, has an electrical conductivity, and is operable to trap dispersed electrons of the irradiated electron beam, wherein
the signal processing section adjusts electric characteristics of the output signal according to a charge amount accumulated in the floating electrode.
2. The electronic device according to claim 1 , wherein
the floating electrode is one of a plurality of floating electrodes,
the electronic device comprises the plurality of floating electrodes,
the insulating film covers a top surface of each of the plurality of floating electrodes,
the through-hole is one of a plurality of through-holes,
the electronic device comprises the plurality of through-holes, and
the plurality of through-holes are formed in the insulating film, respectively penetrating from the top surface of the insulating film to a corresponding floating electrode.
3. The electronic device according to claim 1 , wherein
the floating electrode is one of a plurality of floating electrodes,
the electronic device comprises the plurality of floating electrodes,
the insulating film covers a top surface of each of the plurality of floating electrodes such that at least a portion of the top surface of each floating electrode is exposed.
4. The electronic device according to claim 1 , wherein
the guard ring is connected to a reference potential.
5. The electronic device according to claim 1 , wherein the guard ring has a square-shape or a polygon shape.
6. The electronic device according to claim 1 , wherein
the insulating film includes a first insulating film and a second insulating film,
the first insulating film covers the top surface of the floating electrode,
the through-hole is formed in the first and second insulating films, and
the guard ring surrounds the through-hole on the top surface of the second insulating film.