Multi-level phase change memory
View Patent ↗A phase change memory may be formed which is amenable to multilevel programming. The phase change material may be formed with a lateral extent which does not exceed the lateral extent of an underlying heater. As a result, the possibility of current bypassing the amorphous phase change material in the reset state is reduced, reducing the programming current that is necessary to prevent this situation. In addition, a more controllable multilevel phase change memory may be formed in some embodiments.
1. A method comprising:
forming a pore in a dielectric material, said dielectric material including a first dielectric layer and a second dielectric layer, said first dielectric layer surrounding a first portion of said pore and said second dielectric layer surrounding a second portion of said pore;
forming a sidewall spacer in said pore, said sidewall spacer defining an opening in said pore, said opening including a first portion surrounded by a first portion of said sidewall layer and a second portion surrounded by a second portion of said sidewall layer, said first portion of said sidewall layer being surrounded by said first dielectric layer and said second portion of said sidewall layer being surrounded by said second dielectric layer;
depositing a heater material in said opening; and
removing a portion of said heater material from said opening, said removing recessing said heater material in said opening.
2. The method of claim 1 , further comprising forming a chalcogenide material on said recessed heater material.
3. The method of claim 2 , further comprising planarizing said chalcogenide material.
4. The method of claim 2 , wherein said forming sidewall spacer includes depositing a sidewall spacer material in said pore, said method further comprising planarizing said sidewall spacer material.
5. The method of claim 2 , wherein said chalcogenide material does not extend beyond said opening.
6. The method of claim 1 , wherein said depositing heater material includes planarizing said heater material.
7. The method of claim 1 , wherein said removing includes removing said heater material from said first portion of said opening.
8. The method of claim 7 , wherein said removing removes none of said heater material from said second portion of said opening.
9. The method of claim 7 , further comprising forming a chalcogenide material on said heater material.
10. The method of claim 9 , wherein said chalcogenide material completely fills said first portion of said opening.
11. The method of claim 9 , wherein said chalcogenide material does not extend beyond said opening.
12. The method of claim 9 , wherein said chalcogenide material does not extend beyond said first portion of said opening.
13. The method of claim 1 , wherein said heater material completely fills said second portion of said opening.