Non-volatile memory and fabricating method thereof
View Patent ↗A non-volatile memory having a tunneling dielectric layer, a floating gate, a control gate, an inter-gate dielectric layer and a first doping region and a second doping region is provided. The tunneling dielectric layer is disposed on a substrate. The floating gate is disposed on the tunneling dielectric layer, and has a protruding portion. The control gate is disposed over the floating gate to cover and surround the protruding portion. The protruding portion of the floating gate is fully covered and surrounded by the control gate in any direction, including extending directions of bit lines, word lines and an included angle formed between the word line and the bit line. The inter-gate dielectric layer is disposed between the floating gate and the control gate. The first doping region and the second doping region are respectively disposed in the substrate at two sides of the control gate.
1. A non-volatile memory, comprising:
a tunneling dielectric layer, disposed on a substrate;
a floating gate, disposed on the tunneling dielectric layer, wherein the floating gate has a protruding portion, and the protruding portion is shaped as a hillock and has an inclined sidewall;
a control gate, disposed above the floating gate to cover and surround the protruding portion in all directions;
an inter-gate dielectric layer, disposed between the floating gate and the control gate; and
a first doping region and a second doping region, respectively disposed in the substrate at two sides of the control gate.
2. The non-volatile memory as claimed in claim 1 , wherein a material of the inter-gate dielectric layer comprises silicon oxide/silicon nitride/silicon oxide.
3. The non-volatile memory as claimed in claim 1 , wherein a material of the floating gate comprises doped polysilicon.
4. The non-volatile memory as claimed in claim 1 , wherein a material of the control gate comprises doped polysilicon or polycide.
5. The non-volatile memory as claimed in claim 1 , wherein a material of the tunneling dielectric layer comprises silicon oxide.