Polishing apparatus and polishing method
A polishing apparatus can effectively prevent abrasive particles from falling off a polishing tape during polishing. The polishing apparatus includes: a polishing head for polishing a peripheral portion of a substrate by pressing a surface of a polishing tape, having abrasive particles fixed on the surface, against the peripheral portion of the substrate while allowing the polishing tape to travel in one direction; and a conditioning apparatus, disposed upstream of the polishing head in the traveling direction of the polishing tape, for conditioning the surface of the polishing tape in advance in order to prevent the abrasive particles from falling off the surface of the polishing tape during polishing.
1. A polishing apparatus comprising:
a polishing head for polishing a peripheral portion of a substrate by pressing a surface of a polishing tape, having abrasive particles fixed on the surface, against the peripheral portion of the substrate while allowing the polishing tape to travel in one direction; and
a conditioning apparatus, disposed upstream of the polishing head in the traveling direction of the polishing tape, for conditioning the surface of the polishing tape in advance in order to prevent the abrasive particles from falling off the surface of the polishing tape during polishing.
2. The polishing apparatus according to claim 1 , wherein the conditioning apparatus is a cleaning apparatus for cleaning the surface of the polishing tape by rubbing a rubbing tool against the surface of the polishing tape.
3. The polishing apparatus according to claim 2 , wherein the rubbing tool is a cleaning brush.
4. The polishing apparatus according to claim 2 , further comprising a cleaning tool for cleaning the rubbing tool.
5. The polishing apparatus according to claim 1 , wherein the conditioning apparatus is a fluid blowing apparatus for blowing a fluid toward the surface of the polishing tape.
6. The polishing apparatus according to claim 5 , wherein the fluid is an ultrasonically-vibrating fluid.
7. The polishing apparatus according to claim 1 , wherein the conditioning apparatus is a suction apparatus for applying suction to the surface of the polishing tape.
8. The polishing apparatus according to claim 1 , wherein the conditioning apparatus is a polishing apparatus for polishing the surface of the polishing tape by pressing a grinding stone against the surface of the polishing pad.
9. The polishing apparatus according to claim 1 , wherein the conditioning apparatus is an adhesive contact apparatus for bringing an adhesive having an adhesive surface into contact with the surface of the polishing tape.
10. A polishing apparatus comprising:
a polishing head for polishing a peripheral portion of a substrate by pressing a surface of a polishing tape, having abrasive particles fixed on the surface, against the peripheral portion of the substrate while allowing the polishing tape to travel in one direction; and
a surface protection apparatus, during polishing of the peripheral portion of the substrate by the polishing head, for protecting a central portion of the surface of the substrate from foreign matter produced by the polishing,
wherein the surface protection apparatus includes at least one of a shielding tool for surrounding and protecting the central portion of the surface of the substrate in such a manner as to prevent passage of the foreign matter therethrough and a fluid blowing nozzle for blowing a fluid toward the boundary between the central portion and the peripheral portion of the substrate.
11. The polishing apparatus according to claim 10 , wherein the shielding tool is a PVA sponge disposed in contact with the surface of the substrate.
12. A polishing method comprising:
conditioning a surface of a polishing tape in order to prevent abrasive particles from falling off the surface of the polishing tape during polishing; and
polishing a peripheral portion of a substrate by pressing the conditioned surface of the polishing tape against the peripheral portion of the substrate.