Vias between conductive layers to improve reliability
View Patent ↗Another semiconductor device includes a first layer including a plurality of electrically conductive wires, a second layer, a plurality of non-functional via pads are included in the second layer or between the first layer and the second layer. A dangling via is included within a specified area of the first layer. The dangling vias connect one or more of the wires in the first layer to a respective one of the via pads.
1. A semiconductor device comprising:
a first layer including a plurality of electrically conductive wires;
a second layer including a plurality of electrically conductive wires;
a non-conductive material between the first layer and the second layer;
a first electrically conductive via through the non-conductive material connecting the first and second layers at an intersection of a first wire on the first layer and a first wire on the second layer at a location where a redundant via is not possible; and
a second electrically conductive via coupled between a second wire on the second layer to a conductive member that is electrically isolated from wires in any other layer of the semiconductor device and sufficiently close to the first electrically conductive via to provide protection to the first electrically conductive via from outgassing problems;
wherein the wires in the first and second layers are smaller than wires that conduct power and ground signals in the semiconductor device.
2. The semiconductor device of claim 1 , wherein the second electrically conductive via is the only via within a predetermined distance from the first via.
3. The semiconductor device of claim 1 , wherein the second electrically conductive via is between the first and second layers.
4. The semiconductor device of claim 1 , wherein the wires in the first layer are perpendicular to the wires in the second layer.
5. The semiconductor device of claim 1 , wherein the conductive member is at least 2 pitches long.
6. The semiconductor device of claim 1 , wherein the second electrically conductive via is the only via between the first and second layers within a predetermined distance from the first electrically conductive via.
7. The semiconductor device of claim 1 , wherein the conductive member is approximately as wide as wire on the second layer.
8. The semiconductor device of claim 1 , wherein the first electrically conductive via and the second electrically conductive via are electrically isolated from one another.
9. A semiconductor device, comprising:
a first layer including a plurality of electrically conductive wires;
a second layer including a plurality of electrically conductive wires;
a non-conductive material between the first layer and the second layer;
a first electrically conductive via through the non-conductive material connecting the first and second layers at an intersection of a first wire on the first layer and a first wire on the second layer and where no redundant via is possible; and
a second electrically conductive via coupled between a second wire on the second layer to a conductive member that is electrically isolated from wires in any other layer of the semiconductor device and is in sufficiently close proximity to the first electrically conductive via to provide protection to the first electrically conductive via from outgassing problems;
wherein pitch between the wires in the first layer is less than a pitch at which a redundant via may be reliably placed between two adjacent wires in the first layer.
10. A semiconductor device comprising:
a first layer including a plurality of electrically conductive wires;
a second layer including a plurality of electrically conductive wires;
a non-conductive material between the first layer and the second layer;
a first electrically conductive via through the non-conductive material connecting the first and second layers at an intersection of a first wire on the first layer and a first wire on the second layer, wherein the first electrically conductive via is in a location where no redundant via is possible; and
a second electrically conductive via, which is a dangling via, coupled between a second wire on the second layer to a conductive member that is electrically isolated from wires in any other layer of the semiconductor device and sufficiently close to the first electrically conductive via to provide protection to the first electrically conductive via from outgassing problems;
wherein the wires in the first layer are smaller than wires that conduct power and ground signals in the semiconductor device.
11. A method of making a semiconductor device comprising:
forming a first conductive layer including a plurality of signal wires;
adding a dielectric layer on top of the first layer;
forming a second conductive layer over the dielectric layer including a plurality of signal wires;
forming an isolated via, wherein the isolated via is coupled between a first wire of the first plurality of signal wires in the first conductive layer and a first wire of the plurality of signal wires in the second conductive layer in a location where a redundant via is not possible; and
forming a dangling via between a second wire in the second layer and the conductive pad, wherein the conductive pad is separated from components in the device other than the dangling via and the dangling via is in sufficiently close proximity to the first electrically conductive via to provide protection to the first electrically conductive via from outgassing problems;
wherein the pluralities of signal wires of the first and second conductive layers are smaller than wires that conduct power and ground signals in the semiconductor device.
12. The method of claim 11 , wherein the dangling via is the only via between the first and second conductive layers within a predetermined distance from the isolated via.
13. The method of claim 11 , further comprising:
forming a plurality of conductive pads and the dangling via to achieve a specified via density between the first and second conductive layers.