Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device includes a semiconductor chip having an element formation surface on which at least one element is formed and including a plurality of electrode pads formed on the element formation surface, an interconnect substrate having a principal surface facing the element formation surface of the semiconductor chip and including a plurality of connection pads formed at positions of the principal surface facing the respective corresponding electrode pads, and a plurality of solder bumps provided between the respective corresponding electrode pads and connection pads, and configured to electrically connect the respective corresponding electrode pads and connection pads together. An UBM layer is formed on a portion of each solder bump closer to the corresponding electrode pad and a barrier metal layer is formed on a portion of each solder bump closer to the corresponding connection pad, and the two layers have substantially the same composition of major materials.
1. A semiconductor device comprising:
a semiconductor chip having an element formation surface on which at least one element is formed and including a plurality of electrode pads formed on the element formation surface;
an interconnect substrate having a principal surface facing the element formation surface of the semiconductor chip and including a plurality of connection pads formed at positions of the principal surface facing the respective corresponding electrode pads;
a first barrier layer formed on at least one of the plurality of electrode pads;
a second barrier layer formed on at least one of the plurality of connection pads; and
a plurality of solder bumps provided between the respective corresponding electrode pads and connection pads, and configured to electrically connect the respective corresponding electrode pads and connection pads together,
wherein
the first and second barrier layers have substantially the same composition of major materials.
2. The semiconductor device of claim 1 , wherein
the first barrier layer is formed on the at least one of the plurality of electrode pads other than those which are provided on corner portions of the semiconductor chip.
3. The semiconductor device of claim 2 , wherein
the second barrier layer is formed on the at least one of the plurality of connection pads other than those which face the electrode pads provided on the corner portions of the semiconductor chip.
4. The semiconductor device of claim 3 , wherein
the first and second barrier layers are both amorphous.
5. The semiconductor device of claim 3 , wherein
the first and second barrier layers are both crystalline.
6. The semiconductor device of claim 3 , wherein
the first and second barrier layers are each made of a nickel compound formed by electroless plating.
7. The semiconductor device of claim 3 , wherein
the first and second barrier layers are each made of a nickel compound formed by electroplating.
8. The semiconductor device of claim 3 , wherein
the plurality of solder bumps have substantially the same volume.
9. A method for fabricating a semiconductor device, comprising the steps of:
(a) selectively forming a plurality of electrode pads on an element formation surface of a semiconductor chip on which at least one element is formed;
(b) after (a), forming a first barrier layer containing a metal as a major component on at least one of the plurality of electrode pads by electroless plating;
(c) forming, on a principal surface of an interconnect substrate, connection pads at positions facing the respective corresponding electrode pads of the semiconductor chip;
(d) after (c), forming a second barrier layer containing the metal as a major component on at least one of the plurality of connection pads facing the first barrier layer of the interconnect substrate by electroless plating; and
(e) mounting the semiconductor chip onto the principal surface of the interconnect substrate by positioning the semiconductor chip and the interconnect substrate so that the electrode pads of the semiconductor chip face the respective corresponding connection pads of the interconnect substrate with the respective corresponding solder bumps being interposed therebetween, and bonding the semiconductor chip and the interconnect substrate together using the solder bumps.
10. The method of claim 9 , wherein
in step (b), the first barrier layer is formed on the at least one of the plurality of electrode pads other than those which are provided on corner portions of the semiconductor chip.
11. The method of claim 10 , wherein
the metal contained in the first and second barrier layers contains nickel as a major component.
12. The method of claim 10 , wherein
in step (d), the second barrier layer is formed on the at least one of the plurality of connection pads other than those which face the electrode pads provided on corner portions of the semiconductor chip.
13. The method of claim 10 , wherein
the plurality of solder bumps have substantially the same volume.
14. The method of claim 10 , further comprising the step of:
(f) after step (e), filling a gap between the semiconductor chip and the interconnect substrate with an insulating resin material, and curing the insulating resin material.