Isolated epitaxial modulation device

1. A method of manufacturing an isolated epitaxial modulation device, the method comprising:

forming a barrier structure on a substrate;

forming an isolated epitaxial region on the barrier structure;

forming a semiconductor device in the isolated epitaxial region;

forming a modulation network on the substrate, the modulation network coupled to the semiconductor device;

forming a bond pad, the bond pad electrically coupled to the semiconductor device in the isolated epitaxial region.

2. The method of claim 1 , wherein forming a bond pad comprises forming one of a signal pad and a power pad.

3. The method of claim 1 , wherein forming a barrier structure comprises;

forming a biased buried layer; and

forming a biased well coupled to the biased buried layer to enclose the isolated epitaxial region.

4. The method of claim 1 , wherein forming a semiconductor device in the isolated epitaxial region comprises forming a plurality of parallel transistors.

5. The method of claim 4 , the method further comprising:

forming a conductive ring in the isolated epitaxial region, the conductive ring surrounding the plurality of parallel transistors; and

forming a plurality of conductive strips coupled to the conductive ring, each conductive strip formed between adjacent source regions of the plurality of parallel transistors.

6. The method of claim 5 , further comprising:

forming a ground ring surrounding and coupled to the conductive ring in the isolated epitaxial region.

7. The method of claim 1 , further comprising:

forming a ground pad; and

electrically coupling the isolated epitaxial region to at least one of the bond pad and the ground pad;

wherein the semiconductor device and the epitaxial modulation network are configured to modulate an input voltage.

8. The method of claim 1 , wherein forming the semiconductor device comprises forming one of a metal oxide semiconductor field-effect transistor (MOSFET), a bipolar junction transistor (BJT), and a laterally diffused metal oxide semiconductor (LDMOS) device.

9. The method of claim 1 , wherein forming the modulation network comprises forming a resistor-capacitor (RC) discriminator and a transistor.

10. The method of claim 3 , wherein forming the biased well comprises forming one of a silicon metallurgical junction structure, shallow trench isolation (STI) structure, deep trench (DT) structure, through wafer via (TWV) structure, or through silicon vias (TSV) structure.

11. A method of manufacturing an integrated circuit, the method comprising:

forming processing circuitry on a substrate;

forming a barrier structure on the substrate;

forming an isolated epitaxial region on the barrier structure, the barrier structure electrically isolating the isolated epitaxial region from the substrate;

forming a semiconductor device, the semiconductor device located in the isolated epitaxial region;

forming a modulation network on the substrate; the modulation network electrically coupled to the semiconductor device; and

forming a bond pad electrically coupled to the isolated epitaxial region;

wherein the semiconductor device and the epitaxial modulation network are configured to protect the processing circuitry from current spikes.

12. The method of claim 11 , wherein forming the semiconductor device comprises:

forming a multi-finger n-channel metal oxide semiconductor (NMOS), each of the fingers comprising a gate, a drain region and a source region.

13. The method of claim 12 , further comprising:

forming a conductive structure in the isolated epitaxial region, the conductive structure coupled to a ground potential and comprising:

a conductive ring surrounding the semiconductor device; and

a plurality of conductive strips coupled to the conductive ring, each conductive strip located between adjacent source regions of the plurality of fingers.

14. The method of claim 11 , further comprising forming a ground pad, the ground pad electrically coupled to the isolated epitaxial region.

15. The method of claim 11 , wherein forming the modulation network comprises forming a resistor, a capacitor, and a transistor.

16. The method of claim 15 , wherein forming the transistor comprises coupling the transistor between the bond pad and a ground potential.