Method for surface treatment of copper and copper
View Patent ↗An object of the present invention is to provide a copper surface treatment method capable of keeping certainly a bonding strength between a copper surface and a resist, or between a copper surface and an insulating resin without forming irregularities having sizes of more than 1 μm on the copper surface, and a copper treated with the method. The surface treatment method, comprising: a first step of forming, on a copper surface, a nobler metal than the copper discretely; a second step, subsequent to the first step, of forming copper oxide on the copper surface by oxidation with an alkaline solution containing an oxidizing agent; and third step of dissolving the copper oxide so as to be removed, thereby forming irregularities on the copper surface.
1. A copper surface treatment method, comprising:
a first step of forming, on a copper surface, a nobler metal than the copper discretely,
a second step, subsequent to the first step, of forming copper oxide on the copper surface by oxidation with an alkaline solution containing an oxidizing agent,
a next third step of dissolving the copper oxide so as to be removed, thereby forming irregularities on the copper surface, and
a fourth step of subjecting the copper surface to a treatment for improving the bonding strength thereof after the third step, wherein the fourth step includes at least one treatment selected from the group consisting of a treatment for forming a baser metal than copper onto the copper surface and a treatment with a solution containing an azole compound.
2. The surface treatment method according to claim 1 , wherein the fourth step further includes a treatment with a coupling agent.
3. The surface treatment method according to claim 1 , wherein the fourth step includes both of the treatment for forming the baser metal than copper onto the copper surface, and the treatment with the solution containing the azole compound.
4. The surface treatment method according to claim 1 , wherein the fourth step includes a heating treatment for performing heating to a temperature of 90° C. or higher after the treatment for forming the baser metal than copper onto the copper surface.
5. The surface treatment method according to claim 1 , wherein the oxidizing agent is one or more selected from the group consisting of chlorates, chlorites, hypochlorites, perchlorates, peroxodisulfates and permanganates.
6. The surface treatment method according to claim 1 , wherein the nobler metal than copper is a metal selected from the group consisting of gold, silver, platinum, palladium, rhodium, rhenium, ruthenium, osmium and iridium, and alloys each containing one or more of these metals.
7. The surface treatment method according to claim 1 , wherein the formation amount of the nobler metal than copper is 0.001 μmol/dm 2 or more, and 5 μmol/dm 2 or less.
8. The surface treatment method according to claim 1 , wherein the dissolution of the copper oxide in the third step is attained by use of an acidic solution containing one or more selected from the group consisting of inorganic acids and organic acids.
9. The surface treatment method according to claim 1 , wherein the roughness Rz of the copper surface after the third step is 1 nm or more and 1000 nm or less.
10. A copper having a surface treated with a surface treatment method according to claim 1 .
11. A wiring board having a copper wiring, wherein a surface of the copper wiring is treated with a surface treatment method according to claim 1 .
12. A copper having a surface treated with a surface treatment method according to claim 2 .
13. A copper having a surface treated with a surface treatment method according to claim 3 .
14. A copper having a surface treated with a surface treatment method according to claim 4 .
15. A wiring board having a copper wiring, wherein a surface of the copper wiring is treated with a surface treatment method according to claim 2 .
16. A wiring board having a copper wiring, wherein a surface of the copper wiring is treated with a surface treatment method according to claim 3 .
17. A wiring board having a copper wiring, wherein a surface of the copper wiring is treated with a surface treatment method according to claim 4 .
18. The surface treatment method according to claim 1 , wherein the third step of dissolving the copper oxide so as to be removed forms irregularities not in the form of needles on the copper surface.
19. A copper having a surface treated with a surface treatment method according to claim 18 .
20. A wiring board having a copper wiring, wherein a surface of the copper wiring is treated with a surface treatment method according to claim 18 .