Surface acoustic wave device
A surface acoustic wave device according to the present invention includes a piezoelectric monocrystal substrate 10 , and an interdigital electrode 20 configured of a base electrode layer 21 formed on the piezoelectric monocrystal substrate, the base electrode layer 21 being made of a conductive material, and an aluminum-containing main electrode layer 22 formed on the base electrode layer by epitaxial growth. The electrode 20 has an upper layer 23 formed on the main electrode layer 22 , and the upper layer 23 is made of a conductive material that is different from materials for the main electrode layer and the base electrode layer and has a larger specific gravity than aluminum.
1. A surface acoustic wave device comprising:
a piezoelectric monocrystal substrate having any cut angle, and
an interdigital electrode configured of a base electrode layer formed on the piezoelectric monocrystal substrate, the base electrode layer being made of a conductive material, and an aluminum-containing main electrode layer formed on the base electrode layer by epitaxial growth, wherein:
the interdigital electrode has an upper layer formed on the main electrode layer, the upper layer being made of a conductive material that is different from materials for the main electrode layer and the base electrode layer and has a larger specific gravity than aluminum,
the interdigital electrode is composed of a three-layer structure being configured with the base electrode layer, the main electrode layer, and the upper layer,
the base electrode layer comprises a titanium nitride layer formed on the piezoelectric monocrystal substrate and a titanium layer formed further on the said titanium nitride layer, on which the main electrode layer is formed by epitaxial growth,
the upper layer, which is the top layer of the interdigital electrode and located on the main electrode layer, is made of tungsten or tantalum, and
the interdigital electrode is surrounded by silicon dioxide.
2. The surface acoustic wave device according to claim 1 , wherein the upper layer is thinner than the main electrode layer.
3. The surface acoustic wave device according to claim 1 , wherein the thickness of the upper layer falls within a range of 0.25% to 0.90% of a wavelength of a propagating surface acoustic wave.
4. A duplexer equipped with a surface acoustic wave device, wherein the surface acoustic wave device includes:
a piezoelectric monocrystal substrate having any cut angle, and
an interdigital electrode configured of a base electrode layer formed of the piezoelectric monocrystal substrate, the base electrode layer being made of a conductive material, and an aluminum-containing main electrode layer formed on the base electrode layer by epitaxial growth, wherein:
the interdigital electrode has an upper layer formed on the main electrode layer, the upper layer being made of a conductive material that is different from materials for the main electrode layer and the base electrode layer and has a larger specific gravity than aluminum,
the interdigital electrode is composed of a three-layer structure being configured with the base electrode layer, the main electrode layer, and the upper layer,
the base electrode layer comprises a titanium nitride layer formed on the piezoelectric monocrystal substrate and a titanium layer formed further on the said titanium nitride layer, on which the main electrode layer is formed by epitaxial growth,
the upper layer, which is the top layer of the interdigital electrode and located on the main electrode layer, is made of tungsten or tantalum, and
the interdigital electrode is surrounded by silicon dioxide.
5. A manufacturing method of a surface acoustic wave device, the method comprising:
forming a base electrode layer made of a conductive material on a piezoelectric monocrystal substrate having any cut angle, forming an aluminum-containing main electrode layer on the base electrode layer by epitaxial growth, forming an upper layer on the main electrode layer, the upper layer being made of a conductive material that is different from materials for the main electrode layer and the base electrode layer and forming an interdigital electrode configured of the base electrode layer, the main electrode layer and the upper layer on the piezoelectric monocrystal substrate, wherein:
the interdigital electrode is composed of a three-layer structure being configured with the base electrode layer, the main electrode layer, and the upper layer,
the base electrode layer comprises a titanium nitride layer med on the piezoelectric monocrystal substrate and a titanium layer formed further on the said titanium nitride layer, on which the main electrode layer is formed by epitaxial growth,
the upper layer, which is the top layer of the interdigital electrode and located on the main electrode layer, is made of tungsten or tantalum, and
the interdigital electrode is surrounded by silicon dioxide.
6. The surface acoustic wave device according to claim 1 , wherein the interdigital electrode consists of the three-layer structure.
7. The duplexer according to claim 4 , wherein the interdigital electrode consists of the three-layer structure.
8. The manufacturing method according to claim 5 , wherein the interdigital electrode consists of the three-layer structure.
9. The surface acoustic wave device according to claim 1 , wherein the upper layer is the outermost layer of the interdigital electrode.
10. The duplexer according to claim 4 , wherein the upper layer is the outermost layer of the interdigital electrode.
11. The manufacturing method according to claim 5 , wherein the upper layer is the outermost layer of the interdigital electrode.