Epitaxial substrate having nano-rugged surface and fabrication thereof
The invention provides an epitaxial substrate and fabrication thereof. The epitaxial substrate according to the invention includes a crystalline substrate. In particular, the crystalline substrate has an epitaxial surface which is nano-rugged and non-patterned. The epitaxial substrate according to the invention thereon benefits a compound semiconductor material in growth of epitaxy films with excellent quality. Moreover, the fabrication of the epitaxial substrate according to the invention has advantages of low cost and rapid production.
1. A method of fabricating an epitaxial substrate, comprising the steps of:
preparing a crystalline substrate having an upper surface, wherein the crystalline substrate is formed of sapphire;
depositing a poly-crystalline layer of silicon on the upper surface of the crystalline substrate, the poly-crystalline layer of silicon having a plurality of irregular grain boundaries;
etching the grain boundaries of the poly-crystalline layer by a first wet etching process to obtain a plurality of irregular nano-scale poly-crystalline islands;
taking the plurality of the irregular nano-scale poly-crystalline islands as a non-patterning mask, and etching the regions of the upper surface exposed between the plurality of irregular nano-scale poly-crystalline island by a plasma etching process to obtain a plurality of irregular nano-scale cavities of different depths; and
removing the plurality of the irregular nano-scale poly-crystalline islands completely by a second wet etching process to obtain a nano-rugged, non-patterned epitaxial surface of the crystalline substrate.
2. The method of claim 1 , wherein the nano-rugged, non-patterned epitaxial surface of the crystalline substrate has an average surface roughness (Ra) in a range from 100 nm to 400 nm.
3. The method of claim 1 , wherein the nano-rugged, non-patterned epitaxial surface of the crystalline substrate has a mean peak-to-valley height (Rz) in a range from 50 nm to 350 nm.
4. The method of claim 1 , wherein the poly-crystalline layer is deposited on the upper surface of the crystalline substrate by one selected from the group consisting of an LPCVD (low pressure chemical vapor deposition) process, an PECVD (plasma-enhanced chemical vapor deposition) process, a sputtering process, and a thermal evaporation process, and the poly-crystalline layer has a thickness in a range from 20 nm to 2000 nm.