Etch patterning of nanostructure transparent conductors
View Patent ↗A patterned transparent conductor including a conductive layer coated on a substrate is described. More specifically, the transparent conductor can be patterned by screen-printing an acidic etchant formulation on the conductive layer. A screen-printable etchant formulation is also disclosed.
1. A method comprising:
providing a transparent conductor including a plurality of interconnected silver nanowires;
screen-printing an acidic etchant on the transparent conductor according to a pattern; and
providing a patterned transparent conductor by etching according to the pattern, the pattern defining a partially etched region and an unetched region; and
after etching, heating the patterned transparent conductor,
wherein the partially etched region becomes less conductive after heating, and the etched region and the unetched region are optically uniform.
2. The method of claim 1 wherein the acidic etchant comprises a solvent and one or more acids.
3. The method of claim 2 wherein the acidic etchant further comprising an acid-resistant polymer.
4. The method of claim 1 wherein etching provides the unetched region having a first intermediate resistivity, and the partially etched region having a second intermediate resistivity, wherein the second intermediate resistivity is less than 1000 times of the first intermediate resistivity; and wherein heating provides the etched region having a first final resistivity and the unetched region having a second final resistivity, wherein the second final resistivity is at least 1000 times of the first final resistivity.
5. The method of claim 2 wherein the acid is HCl, HNO 3 , HOAC or H 3 PO 4 .
6. The method of claim 1 where the acidic etchant comprises HCl and HNO 3 .
7. The method of claim 1 wherein the acidic etchant further comprises a metal halide.
8. The method of claim 7 wherein the metal halide is FeCl 3 or CuCl 2 .
9. The method of claim 3 wherein the acid-resistant polymer is a polyamide or poly(2-acrylamido-2-methyl-1-propanesulfonic acid).